Operating Manual Leica EM ACE600
Version 01/19
Page 110
5.
Maintenance and service
The purpose of these activities is to
Maintain the optimal operating conditions of the Leica EM ACE600
Minimize downtime
Provide a standard maintenance schedule
Deal with malfunctions
Malfunctions during operation of the Leica EM ACE600 coating system are
reported in an information window. A clear text error message provides
information about the cause of the malfunction and the action required.
For further questions, regarding malfunctions refer to the error list under chapter
5.
Example:
Caution!
Injuries or damage to the system may be caused by servicing and cleaning
the system incorrectly.
5.1
General instructions for maintenance and cleaning
External elements (dust, grease, etc.) may prevent achieving the required
vacuum.
When working on the vacuum chamber or parts, which are in the vacuum
chamber of the Leica EM ACE600, coating system it is essential to follow the
principles of vacuum hygiene. Gloves must be worn when disassembling and
assembling components in the vacuum area and for all adjustment work.
All work must be carried out in a clean, oil/grease-free and dust-free environment.
