Operating Manual Leica EM ACE600
Version 01/19
Page 57
Do not tighten the screws when the instrument is under vacuum. They can’t be
opened when vented and there is a risk of damaging the thread.
4.7.2 Choosing a sputtering protocol
When the head is inserted after completing the preparation in 4.7.1 a sputtering
process can be run. Select a sputter process on the first screen to enter the
process screen. In the library of recipes (1) all stored protocols are available and
can be chosen. Tapping on the characteristics of the protocol (2) opens the list of
recipes. There, the parameters for the process can be changed and saved. Only
thickness can be adjusted on the process screen (3). Once everything relevant for
the coating process is defined, the process can be started (4).
Select a protocol by tapping on it. Once it is marked, by tapping on a specific
category, the parameters can be changed. Alternatively, a protocol can be copied
and then modified or a new one added.
1
2
3
4
