Operating Manual Leica EM ACE600
Version 01/19
Page 58
The method defines if the sputter process is finished by a time or certain thickness
(1) by ticking or un-ticking the quartz usage box (2). Also, the sputter current is set
(3) and if pre-sputtering is performed (4).
Note: For pre-sputtering the same base and sputter vacuum as defined for
the sputter process, are used. Pre-sputter current is defined under the
material file (see also chapter 4.1).
Defining the sample height ensures that the working distance is kept constant.
The sputter source is angled 25° towards the stage. Tilting the stage influences
the coating angle. Rotation speed can be set from 1 to 5 (equals to 20 rpm)
Settings can be checked by pushing the Test button. Init stops the testing and
moves the stage to the initial position, such as abandoning the edit stage screen.
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