Operating Manual Leica EM ACE600
Version 01/19
Page 98
Two kinds of vacuum have to be defined. The vacuum which needs to be reached
before the glow discharge process starts (= base vacuum) and the process
vacuum which will be adjusted by letting air in.
60 seconds @ 15 mA at 4E-1 mbar (1E-3 mbar Pre-Process- Vacuum) guideline
for glow discharging grids to make them hydrophilic.
To ensure proper functionality of the glow discharge process please make
sure the electrode is cleaned regularly especially when sputtering thicker
layers.
4.11. Sequence
Single processes can be combined into a sequence. Depending on the
configuration of the instrument sputtering, evaporation processes and glow
discharge can be automatically run one after the other. If hardwear is present,
transfer processes can be included in a sequence. They can be put in any order
and repeated. All protocols of the library can be combined to a sequence.
Additionally, ‘waiting’ elements to pause between two processes can be placed.
On the main screen press open sequence.
