Operating Manual Leica EM ACE600
Version 01/19
Page 81
Select a protocol by tapping on it. Once it is marked, by tapping on a specific
category, the parameters can be changed. Alternatively, a protocol can be copied
and then modified or a new one added.
The method defines if the e-beam process is finished by a time or certain
thickness (1) by ticking or un-ticking the quartz usage box (2). Ticking the degas
box (3) has the effect that the target material is heated up for cleaning before
evaporation is done (shutter stays closed). Degas parameters are stored in the
material file. The target power will influence the coating rate (4).
Stage allows setting a coating angle or tilt of the stage. When setting a coating
angle, the tilt is automatically calculated or vice versa. The working distance is
kept constant. Continuous rotation from 1-5 can be set (5 equals to 20 rpm).
1
2
3
4
