Operating Manual Leica EM ACE600
Version 01/19
Page 2
Table of Contents
1.
Introduction ..................................................................................................................... 4
1.1
Identification .................................................................................................................. 6
1.1.1
Product ................................................................................................................................ 6
1.1.2
Name and address of the manufacturer .............................................................................. 6
2.
Product description ........................................................................................................ 7
2.1
Field of application and proper use ............................................................................... 7
2.2
Dimensions and weight ................................................................................................. 8
2.3
Environmental conditions for operation and storage .................................................... 8
2.4
Safety information ......................................................................................................... 9
2.4.1
General instructions ............................................................................................................. 9
2.4.2
Safety measures at the installation site ............................................................................. 10
2.4.3
Qualification of operating personnel .................................................................................. 10
2.4.4
Residual hazards ............................................................................................................... 10
2.4.5
Safety measures when working with nitrogen ................................................................... 11
2.4.6
Emergency procedure ....................................................................................................... 15
3.
Installation and set up .................................................................................................. 15
3.1.
Warranty ..................................................................................................................... 15
3.2.
Instrument overview .................................................................................................... 16
3.3.
Delivery of the instrument ........................................................................................... 17
3.4.
Installation requirements for the instrument ................................................................ 17
3.5.
Unpacking and connection ......................................................................................... 18
3.6
Inserting chamber shielding ........................................................................................ 22
3.7
Shutter installation ...................................................................................................... 26
3.8.
Quartz crystal measurement installation ..................................................................... 28
3.8.1
Eccentric quartz holder ...................................................................................................... 30
3.9.
Stage installation ........................................................................................................ 32
3.9.1
Rotating stage .................................................................................................................... 35
4.
Operating instructions .................................................................................................. 37
4.1
General functions ........................................................................................................ 38
4.1.2
Software update................................................................................................................. 42
4.2
Pump and Vent ........................................................................................................... 44
4.3
Vacuum test ................................................................................................................ 45
4.4
Process start and stop ................................................................................................ 45
4.5
Thickness monitoring and geometrical correction (QSG) ........................................... 45
4.6
Carbon thread coating ................................................................................................ 46
4.6.1
Loading a carbon thread .................................................................................................... 47
4.6.2
Choosing a carbon thread protocol ................................................................................... 51
