Operating Manual Leica EM ACE600
Version 01/19
Page 119
W1301
Warning
Quartz usage period
exceeded, Change quartz to
guarantee valid
measurement
Quartz usage period exceeded
after measured value > 6.1 MHz
or < 4 MHz
E1500
Motor
error
Lift motor error detected
Initialization of lift motor failed. Try
re-initialization and learning.
E1302
Process
Process terminated,
Thickness not increasing
(timeout), Check quartz and
try again
No thickness increase in a specific
time -> necessary for all methods
to detect if film-thickness can be
reached during process -> Check
source or quartz and try to run
process again
E1303
Process
Process terminated, Quartz
unstable, Change quartz to
guarantee valid
measurement
Quartz unstable -> Measuring of
frequency before process has to
be stable to guarantee valid
measurement -> Change quartz in
case and try to run process again
E1600
Motor
error
Shutter motor error detected
Initialization of shutter motor
failed. Try re-initialization and
learning.
E1601
Motor
error
Shutter motor not connected,
Check cable and restart
system
Shutter motor not detected during
software init. Restart or check
cable connections.
E1700
Motor
error
Rotation motor error detected
Initialization of rotation motor
failed. Try re-initialization and
learning.
E1800
Motor
error
Tilt motor error detected
Initialization of tilt motor failed. Try
re-initialization and learning.
W1900
Pump
fault
Door open, please close the
door
Process / Pumping aborted -
Check door sensor.
W1901
Pump
fault
Cover open please close the
cover
Process / Pumping aborted -
Check cover sensor.
E1902
Process
head (1) not connected,
Connect cable
Process aborted - Specific head
not connected!
E1903
Process
head (2) not connected,
Connect cable
Process aborted - Specific head
not connected!
