0142530-000 AB
KLA-Tencor Confidential
12-11
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide
Calibrations - Step Height Calibration
19.
Use the arrow buttons to locate the calibration step on the standard.
If the Video Calibration has been performed in the current zoom position, the
hash marks on the crosshair are 100
μ
m apart.
20.
Position the crosshair about 200
μ
m from the left side of the step and click
OK
(at the bottom right of the screen), or click
Start
in the tool bar. The instrument
performs the same scan through the exact same location as many times as
prescribed in the recipe (the
Step
Height Calibration Options
dialog box,
21.
During the Step Height Calibration Scan procedure, the progression of each scan
can be observed in the lower right corner of the screen, on the scan graph. Each
scan is displayed in a different color.
22.
The individual scans (Multi-Scan Average) are averaged to arrive at a single
step height. The system then compares the average of the scans with the known
VLSI standard step height that was entered into the Step Height Calibration
Option dialog box. (See Step 14 on page -10.)
When complete, the calibration factor is automatically calculated and displayed
at the end of the information area of the Analysis window. (See the circled area
at the bottom left in
.)
The calibration factor is displayed with the last calibration factor. Both should
be close. See the circled area at the bottom left of
To compare the step height standard value with the averaged measured height,
click STATS in the tool bar to open the Surface Parameter Summary statistics
window. The step height result is displayed in the Statistics window. See the
white area just above the Analysis trace window in
.
23.
Click the
SET
button in the tool bar to save the calibration factor, or the
Cancel
button to keep the original value and return to the Calibrations screen. (See the
circled area at the top right in
.)
