KLA Tencor P-16+, User Manual

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0142530-000 AB KLA-Tencor Confidential 3-63
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Bearing Ratio and Cutting Depth
3
Access the Bearing Ratio and Cutting Depth Information Display window by clicking
the Bearing Ration/Cutting Depth button in the Recipe Editor. (See
Figure 3.47 .)
Bearing Ratio (t
p
)
3
Bearing Ratio
is also know as Bearing Length Ratio (t
p
). ANSI defines it as:
Bearing Length Ratio (t
p
) and Others . A reference line is drawn parallel to
the mean line and at a preselected or predetermined distance from it to intersect
the profile in one or more subtended lengths. The bearing length ratio is the ratio
of the sum of these subtended lengths to the length of the mean line.
The
Bearing Ratio
is determined according to the following formula:
The bearing length is the sum of the subtended lengths (S1 and S2 in Figure 3.50 ).
The bearing ratio is the ratio of the bearing length to the sampling length (L in
Figure 3.50 ) as shown in the above formula.
Setting the 2D Bearing Ratio
Use the following procedure to set the 2D Bearing Ratio variables.
Figure 3.47 Bearing Ration and Cutting Depth Parameters
t
p
= S1 + S2
L