0142530-000 AB
KLA-Tencor Confidential
13-21
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide
Stylus Change Procedure - Stylus Removal and Replacement
When the Triangle is
Present, But System Does
Not Find It.
The message could also say that the scan might have caught the triangle and ask the
user to choose either to accept it, change the location, or reject it. If the
Conclusion
box informs the user that the system either didn’t find the triangle for sure or asks the
user to check the trace for the presence of the triangle, it might be necessary to reset
the measurement cursors. (See
1.
If the triangle is obvious, reset the measurement cursors to the top edges of the
triangle. To reset the measurement cursors, look in the top area over the graph,
click and hold on the right cursor, then drag it to the top right corner of the step
in the trace. Repeat for the left cursor, dropping it on the top left corner. (See
.)
Figure 13.32
Pre Acceptance Analysis Screen
In this case, the system placed
the identification cursors at the
left edge of the trace, missing
the triangle that is obviously
displayed mid trace. (See
for resolution.)
Figure 13.33
Analysis Screen with Cursors Manually Placed
Click, hold and drag each cursor to the top edges of the step.
