KLA Tencor P-16+, User Manual

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Sequence Recipe and Data - Creating a Sequence Recipe KLA-Tencor P-16+ / P-6 User’s Guide
6-16 KLA-Tencor Confidential 0142530-000 AB
3/13/09
4.
Click
Associate Dies...
(See Figure 6.17 .)
This displays XY screen titled “
Associate Dies With Sequence Scan Sites
,” with
a graphic display of the die grid configuration, visible to the right of the video
display area. (See
Figure 6.18 .).
5. Each rectangle on the die grid configuration represents a single die. The green
one with the number one (1) in it represents the original scan site designated for
the chosen scan recipe. To add dies, simply click the desired die where the
additional scan is to be made. Each successive site turns green and contains a
number.
Figure 6.17 Sequence Editor with Die Grid Menu
Step 3 Click Die Grid in the
menu bar to display its menu.
Step 4 Click Associate Dies... to
begin the process of choosing
new scan sites.
NOTE: The scans are performed according to the die site numbers.
To reduce sequence timing, choose the scan sites in a circular fashion
for minimum time of travel between scan sites. (See
Figure 6.18 .)