Scan Recipes - Creating and Editing a Scan Recipe
KLA-Tencor P-16+ / P-6 User’s Guide
3-30
KLA-Tencor Confidential
0142530-000 AB
3/13/09
Saturated Data Points
If, in the course of a scan, the upper limit of any one of the ranges is reached, the
system aborts the scan and a message is issued reporting that there are too many
saturation data points. The scan appears as complete, however, the end of the
trace is only a continuation of the last data point, not actual scan data.
Profile Type
: Available choices for each range and the resultant scan traces
Figure 3.22
Vertical Ranging - Profile Types
For the 131, 327, and 1000
μ
m
ranges, the three Profile Types allow
the user to choose features that go
up or down from the sample surface
the full range, or split the difference
between up and down features.
Table 3.20
Profile Types
Profile Type
Range
Description
131
μ
m
327
μ
m
1000
μ
m
131
μ
m scans features that are approximately
52
μ
m up
or
down
from the scan’s starting
point.
327
μ
m scans features that are approximately
130
μ
m up
or
down
from the scan’s
starting point.
1000
μ
m scans features that are approximately
400
μ
m up
or
down
from the scan’s
starting point.
64
μ
m
This scans features that are approximately
26
μ
m up
or
down
from the scan’s starting
point.
26
μ
m
This scans features that are approximately
10
μ
m up
or
down
from the scan’s starting
point.
13
μ
m
This scans features that are approximately
5
μ
m up
or
down
from the scan’s starting
point.
6.5
μ
m
This scans features that are approximately
2.5
μ
m up
or
down
from the scan’s starting
point.
131
μ
m
327
μ
m
1000
μ
m
131
μ
m scans features
≈
100
μ
m up
from the scan’s starting point.
327
μ
m scans features
≈
240
μ
m up
from the scan’s starting point.
1000
μ
m scans features
≈
750
μ
m up
from the scan’s starting point.
