Sequence Recipe and Data - Sequencing with Manual Deskew (Applies to Both P-16+ and P-6)
KLA-Tencor P-16+ / P-6
6-38
KLA-Tencor Confidential
0142530-000 AB
3/13/09
b.
Enter a name for the workspace.
c.
Click
OK
to save.
6.
To review both parameter data and the trace:
a.
Click the
File
menu, and select
Load Workspace
to retrieve the workspace.
b.
Highlight the workspace name in the drop-down menu.
c.
Click
OK
. The screen reconfigures to the desired trace/data window
orientation.
S
EQUENCING
WITH
M
ANUAL
D
ESKEW
(A
PPLIES
TO
B
OTH
P-16+
AND
P-6)
6
The reason for programming a sequence is to automate a repetitive series of
measurements on multiple samples. The example contains all of the essential features
of a sequence.
Even with a locator or some sort of fixture, the second and subsequent samples cannot
reliably be placed on the stage in the exact same position, and with the same
alignment, as the first. The new sequence can still be used, but each of the scan sites
must be manually located and retaught before running the sequence.
Deskew enables and defines two points on a sample to be used as reference points
prior to the start of a sequence. These points are then used to mathematically correct
for translational (X, Y) and rotational (theta) error in sample positioning.
1.
Create a new sequence.
2.
When ready to set up manual deskew, proceed with the following steps.
3.
Set the deskew mode to
Manual Deskew
.
Note that two deskew steps now appear in the sequence list on the right side of
the window.
4.
Select the first deskew site by double-clicking anywhere on the
Deskew Site 1
line in the sequence list.
5.
Click the
Teach Loc
button, or double-click the deskew site. The Manual
Deskew Teach window appears.
The two deskew points should be in opposite quadrants, with each being at least
half way to the edge of the substrate.
6.
Select the first deskew point. Select an obvious point, such as the corner of an
easily and uniquely identifiable rectangle.
Click the chosen position.
The stage moves so that the crosshair are centered on the selected site.
7.
Click
OK
.
The Sequence Editor window reappears, with the X and Y coordinates of the
selected site entered in the deskew Site 1 step.
8.
Select the second deskew point.
9.
Repeat steps
through
for the second deskew site.
10.
Once the deskew sites have been successfully established, proceed to program
the rest of the sequence steps.
