KLA Tencor P-16+, User Manual

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Stylus Change Procedure - Stylus Removal and Replacement KLA-Tencor P-16+ / P-6 User’s Guide
13-16 KLA-Tencor Confidential 0142530-000 AB
3/13/09
When making this calibration, first use the 300
μ
m triangle to complete the
150
μ
m scan. If the stylus offset is too great, the scan misses the triangle. If this
happens, try the 1000
μ
m (1 mm) triangle to complete the 500
μ
m scan. If that is
successful, retry the 300
μ
m triangle.
If the 500
μ
m scan missed the 1000
μ
m triangle, the stylus needs to be
physically realigned by an authorized KLA-Tencor service representative.
15.
Use the linear movement arrow buttons (see Figure 13.23 .) to locate one of the
150
μ
m alignment patterns with its crosshair alignment pattern at its left side.
(See Figure 13.22 .)
16. Click at the center of the Crosshair Pattern to align it with the screen crosshair.
(See
Figure 13.24 .) The crosshair pattern should align precisely with the screen
crosshair.
Figure 13.22 KLA-Tencor ProCal Wafer
150
μ m
alignment pattern with
its crosshair alignment pattern
at its left side.
300
μ m
triangle is used
for the 150
μ m
scan.
Figure 13.23 Aligning the Tool with Screen Crosshair
Step 15 Use the arrow
buttons to locate one of the
300
μ
m triangles with its
crosshair pattern next to it.