KLA Tencor P-16+, User Manual

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Calibrations - Step Height Calibration KLA-Tencor P-16+ / P-6 User’s Guide
12-10 KLA-Tencor Confidential 0142530-000 AB
3/13/09
14.
Standard Step Height Value : Enter the nominal step height value, for the
standard being used, into the Standard Step Height Value field. Select the correct
units from those available in the drop-down list to the right. See
Figure 12.11 .
15. Recipe:
The system provides both default and customizable calibration recipes for each
of the three ranges. When a range is chosen, either the Default or a Custom
recipe can be used to perform the calibration. The currently applied calibration
recipe is displayed to the right of the chosen range. If nothing is changed, the
currently displayed recipe is used for the calibration procedure.
Choose
Default
for the calibration unless there is a very good reason to change
the recipe
16. To proceed with the calibration using the recipe indicated to the right of the
range (Default or Custom), click
Continue
.
Default Recipe Option
17. To apply the Default recipe when “Custom” is indicated, click
Default
. The
message, “Copy Default to Custom recipe?” appears. Clicking on
Yes
replaces
the parameters in the Custom recipe with Default values. Clicking
No
retains the
current Custom value.
18. Click
FOCUS
to null the stylus near the VLSI Step Height Standard surface and
bring the standard into focus.
NOTE: Units in Å correspond to recipes for VLSI Thin Film standards;
units in
μ
m correspond to the longer scan VLSI Thick Film standards.
Figure 12.11 Step Height Calibration Options Dialog Box
Step 12 Choose the range
that is to be calibrated.
Step 13 Click the down arrow to
display the menu. Choose the
number of scans per calibration.
Step 14 The step height standard
being used should have an absolute
height value on it. Double-click the
numerical box next to Standard Step
Height Value: and type in the height
displayed on the standard.
Ensure that the units displayed
are identical to the step height
units. To change the units,
click the menu-arrow and click
the correct units.
CAUTION: KLA-Tencor recommends using the Default recipe for all
calibrations. Default recipes should always be used unless there is a
very good reason for creating a custom recipe. Creating a custom
recipe for a calibration procedure could result in inaccurate calibration
results. The system is designed to operate using Default recipes only.