0142530-000 AB
KLA-Tencor Confidential
3-89
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide
Scan Recipes - Feature Find
Scan data is saved as model, such as the model shown below. This model is
for the edge of the array, with the top two lines including the 5
μ
m lines and
the bottom two lines including the flat surface below the array.
Figure 3.71
Edge of an Array of 5 µm Lines
Figure 3.72
Model Feature Search for the Edge of an Array of 5
μ
m Lines
