EXPLODED VIEW OF X-AXIS (90
°
THETA)
(F-3A)
Index
Number
Disco
Part No.
---
Description
Remarks
Quantity
per Assy
51
MGSSM06016U
---
Soc Hd Screw
M6 x 16
4
52
MODDX065
---
Plate(Insulation)
1
53
MGSSM05016U
---
Soc Hd Screw
M5 x 16
12
54
MGSSM06010U
---
Soc Hd Screw
M6 x 10
3
55
MODBX012
---
Spring End
1
56
MODBX013
---
Spring(Tension)
1
57
MODBX018
---
Stud Bolt
1
58
MGW-M05U
---
Washer
M5
4
59
MODDX040
---
Support(Tension)
1
60
MODBX014
---
Tension Rod
1
61
MSHK-0609P4T
---
Needle Roller Bearing
HK-0609
2
62
MODBX020
---
Tension Pin
1
63
MG6N-M06-3U
---
Hex Nut
M6-3
2
64
MODBX061
---
Pulley(Timing)
12XL037-6F
1
65
MSE-42W
---
Retaining Ring
E-42
1
66
MODDX024
---
Timing Belt
400XL037
1
67
MODDX144
---
Bracket(Connector)
1
68
MODDX048
---
Plate(Terminal)
1
69
MODCH104
---
Connector Bracket
1
70
MGW-M04U
---
Washer
M4
7
71
EAUA--089700
---
X-Axis Sensor Board
UA0897
1set
72
MGTK-M0305UB
---
Truss Hd Screw
M3 x 5
2
73
MODDX149
---
Slit(2, X-Axis Sensor)
1
74
MODDX148
---
Slit(1, X-Axis Sensor)
1
74A
MG6N-M03-1U
---
Hex Nut
M3-1
4
910810
Summary of Contents for DAD 2H/6T
Page 5: ...INTRODUCTION...
Page 7: ...A GENERAL...
Page 9: ...B CONSTRUCTION...
Page 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Page 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Page 13: ...C CIRCUIT DIAGRAM...
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Page 72: ...EAUA 087600...
Page 74: ...EAUA 087703...
Page 76: ...EAUA 087800 X Y EAUA 087900 Z...
Page 78: ...EAUA 023600...
Page 81: ...D MAINTENANCE...
Page 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Page 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Page 117: ...F ILLUSTRATION AND PARTS LIST...
Page 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Page 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Page 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Page 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Page 137: ...MEMO...
Page 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Page 141: ...MEMO...
Page 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Page 144: ...EXPLODED VIEW OF Y AXIS F 4...
Page 148: ...EXPLODED VIEW OF Z AXIS F 5...
Page 154: ...EXPLODED VIEW OF PIPING A F 6...
Page 156: ...EXPLODED VIEW OF PIPING B F 7...
Page 165: ...G REGULAR INSPECTIONS...
Page 169: ...H CAMERA HEAD MONITOR TV...
Page 174: ...H 5 External Operating Unit Fig H 2 910110...
Page 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Page 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Page 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Page 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Page 179: ...J MICROSCOPE MODEL DS...