DISCO DAD 2H/6T, Troubleshooting Manual

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EXPLODED VIEW OF X-AXIS (90
°
THETA)
(F-3A)
Index
Number
Disco
Part No.
---
Description Remarks
Quantity
per Assy
1 MODDN005 --- Universal Chuck Table 1
2 MADDX904 --- 90
°
Theta-Axis Assy 1
3 MSCO0555AN --- “O” Ring S-110 1
4 MODDXA79 --- Seal Ring 1
5 MODDXB64 --- Sealing Rubber 1
6 MGTK-M0412UB --- Truss Screw M4 x 12 8
7 MODDX081 --- Seal Washer 8
8 MODDX129 --- Cover(Water) 1
9 MGSSM04012U --- Soc Hd Screw M4 x 12 4
10 MODDX130 --- Ring(Protect) 1
11 MGSKM2.505U --- Fil Hd Screw
M2.5 x 5
8
12 MODDXB53 --- Spring Holder(1) 1
13 MODDXB54 --- Leaf Spring(1) 1
14 MODDXA71 --- Outer Housing 1
15 MODDX146 --- Ring(Center) 1
16 MODDXA81 --- Plate(Slit) 2
17 MGSSM03005U --- Soc Hd Screw M3 x 5 6
18 MGW-M03U --- Washer M3 24
19 MODDX140 --- Sensor Slit(2) 1
20 MODDXA75 --- Rotating Disc 1
21 MODDX139 --- Sensor Slit(1) 1
22 MGSSM0414U --- Soc Hd Screw M4 x 14 6
23 MGSSM03006U --- Soc Hd Screw M3 x 6 10
24 MODDXA76 --- Block(Joint) 1
25 MSCO0502AN --- “O” Ring S-5 1
900830