iii
4. Setting-up Operation........................................................................................................................... E-11
5. Semi/Fully Auto Operation................................................................................................................. E-15
6. Driver Control Circuit Board.............................................................................................................. E-17
7. Driver.................................................................................................................................................. E-19
8. Inverter ............................................................................................................................................... E-21
9. Self-diagnostics .................................................................................................................................. E-30
10. Inverter Alarm Resetting .................................................................................................................... E-35
F. ILLUSTRATIONS AND PARTS LIST
Exploded View of Main Body (A) ............................................................................................................. F-1
Exploded View of Main Body (B).............................................................................................................. F-2
Exploded View of X-axis (90° Theta) ..................................................................................................... F-3A
Exploded View of X-axis (Manual Theta) (MODEL DAD-2H/6TM) .....................................................F-3B
Exploded View of X-axis (360° Theta) ....................................................................................................F-3C
Exploded View of Y-axis ........................................................................................................................... F-4
Exploded View of Z-axis............................................................................................................................ F-5
Exploded View of Piping (A) ..................................................................................................................... F-6
Exploded View of Piping (B) ..................................................................................................................... F-7
(Not Assigned)............................................................................................................................................ F-8
(Not Assigned)............................................................................................................................................ F-9
G. REGULAR INSPECTIONS
1. Daily Inspection, Maintenance and Adjustment .....................................................................................G-1
2. Weekly Inspection, Maintenance and Adjustment .................................................................................G-1
3. Monthly Inspection, Maintenance and Adjustment ................................................................................G-2
4. Spindle Inspection ..................................................................................................................................G-2
5. I/O Circuit Board Jumper Setup Procedure ............................................................................................G-3
H. CAMERA HEAD MONITOR TV
1. General ...................................................................................................................................................H-1
2. Features...................................................................................................................................................H-1
3. Composition of Equipment.....................................................................................................................H-2
4. Specifications..........................................................................................................................................H-2
5. Connections ............................................................................................................................................H-4
6. Operating Procedures .............................................................................................................................H-4
J. MICROSCOPE MODEL DS
1. Specifications...........................................................................................................................................J-1
2. Adjustment and Repair ............................................................................................................................J-1
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Summary of Contents for DAD 2H/6T
Page 5: ...INTRODUCTION...
Page 7: ...A GENERAL...
Page 9: ...B CONSTRUCTION...
Page 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Page 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Page 13: ...C CIRCUIT DIAGRAM...
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Page 72: ...EAUA 087600...
Page 74: ...EAUA 087703...
Page 76: ...EAUA 087800 X Y EAUA 087900 Z...
Page 78: ...EAUA 023600...
Page 81: ...D MAINTENANCE...
Page 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Page 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Page 117: ...F ILLUSTRATION AND PARTS LIST...
Page 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Page 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Page 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Page 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Page 137: ...MEMO...
Page 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Page 141: ...MEMO...
Page 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Page 144: ...EXPLODED VIEW OF Y AXIS F 4...
Page 148: ...EXPLODED VIEW OF Z AXIS F 5...
Page 154: ...EXPLODED VIEW OF PIPING A F 6...
Page 156: ...EXPLODED VIEW OF PIPING B F 7...
Page 165: ...G REGULAR INSPECTIONS...
Page 169: ...H CAMERA HEAD MONITOR TV...
Page 174: ...H 5 External Operating Unit Fig H 2 910110...
Page 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Page 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Page 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Page 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Page 179: ...J MICROSCOPE MODEL DS...