EXPLODED VIEW OF X-AXIS
(F-3D)
Index
Number
Disco
Part No.
---
Description
Remarks
Quantity
per Assy
1
MODTF2-6-1
---
Tape Frame
As Req’d
2A
MADDXB02
---
Chuck Table Assy
3 Inch
1set
2B
MADDXB03
---
Chuck Table Assy
4 Inch
1set
2C
MADDXB04
---
Chuck Table Assy
5 Inch
1set
2D
MADDXB05
---
Chuck Table Assy
6 Inch
1set
3
MODDXE33
---
Magnet Holder(2)
1
4
MGSK-M0305U
---
Fil Hd Screw
M3 x 5
8
5
MODDXC18
---
Frame Locating Pin
2
6
MOGAR219
---
Magnet
4
7A
MODDXE29
---
Chuck Table
3 Inch
1
7B
MODDXE30
---
Chuck Table
4 Inch
1
7C
MODDXE31
---
Chuck Table
5 Inch
1
7D
MODDXE32
---
Chuck Table
6 Inch
1
8
MODDXE35
---
Magnet Holder(3)
2
9
MODDXE34
---
Magnet Holder(1)
1
10
MODBNA06
---
Locating Pin
1
11
MODDN738
---
Rubber Seal
1
900830
Summary of Contents for DAD 2H/6T
Page 5: ...INTRODUCTION...
Page 7: ...A GENERAL...
Page 9: ...B CONSTRUCTION...
Page 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Page 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Page 13: ...C CIRCUIT DIAGRAM...
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Page 72: ...EAUA 087600...
Page 74: ...EAUA 087703...
Page 76: ...EAUA 087800 X Y EAUA 087900 Z...
Page 78: ...EAUA 023600...
Page 81: ...D MAINTENANCE...
Page 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Page 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Page 117: ...F ILLUSTRATION AND PARTS LIST...
Page 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Page 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Page 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Page 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Page 137: ...MEMO...
Page 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Page 141: ...MEMO...
Page 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Page 144: ...EXPLODED VIEW OF Y AXIS F 4...
Page 148: ...EXPLODED VIEW OF Z AXIS F 5...
Page 154: ...EXPLODED VIEW OF PIPING A F 6...
Page 156: ...EXPLODED VIEW OF PIPING B F 7...
Page 165: ...G REGULAR INSPECTIONS...
Page 169: ...H CAMERA HEAD MONITOR TV...
Page 174: ...H 5 External Operating Unit Fig H 2 910110...
Page 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Page 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Page 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Page 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Page 179: ...J MICROSCOPE MODEL DS...