E-31
DISPLAY
SIGNIF SOLUTION
E
A013
SEMIAUTO MODE CANNOT BE ENTERED
The theta cw or ccw limit sensor is on, and therefore semiauto cannot be entered.
2)
B-type Errors (disabled key operation)
DISPLAY
SIGNIF SOLUTION
E
B001
DISABLED KEY PRESSED
During certain sequential operations (ie. SEMI-AUTO, FULL-AUTO) the operation
of other, unrelated (ie. INDEX) keys is suspended. If such a key is pressed, this error
code appears without disrupting operation.
3)
C-type Errors (mechanical failures during operation)
DISPLAY
SIGNIF SOLUTION
E
C001
E
C002
E
C003
E
C004
SET-UP FAILURE
This error code is initiated when the Z-axis lower limit sensor fails to sense contact
with the chuck table during set-up.
Check this sensor and take appropriate action.
FAILURE TO POSITION CHUCK TABLE IN CENTER
Instead of stopping at the center, the table stops when it reaches the X-axis left or right
end of the Y-axis front or rear end. In most cases, failure to sense the center is due to
malfunction of either the X- or Y-axis center sensors, so perform a check of the center
sensors.
FAILURE TO POSITION TABLE UNDER SCOPE
In this case the X-axis goes to either the left or right end limit and stops. The cause is
usually a malfunction of the sensor which determines the table position under the
scope, so inspect this sensor.
FAILURE TO RISE TO SET HEIGHT AFTER SET-UP
Spindle stops at upper limit rather than at the input height.
This is usually caused by a set-up value which is not within the specified range, so
check the value and, when corrected, push the SET-UP key again.
850130
Summary of Contents for DAD 2H/6T
Page 5: ...INTRODUCTION...
Page 7: ...A GENERAL...
Page 9: ...B CONSTRUCTION...
Page 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Page 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Page 13: ...C CIRCUIT DIAGRAM...
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Page 72: ...EAUA 087600...
Page 74: ...EAUA 087703...
Page 76: ...EAUA 087800 X Y EAUA 087900 Z...
Page 78: ...EAUA 023600...
Page 81: ...D MAINTENANCE...
Page 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Page 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Page 117: ...F ILLUSTRATION AND PARTS LIST...
Page 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Page 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Page 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Page 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Page 137: ...MEMO...
Page 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Page 141: ...MEMO...
Page 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Page 144: ...EXPLODED VIEW OF Y AXIS F 4...
Page 148: ...EXPLODED VIEW OF Z AXIS F 5...
Page 154: ...EXPLODED VIEW OF PIPING A F 6...
Page 156: ...EXPLODED VIEW OF PIPING B F 7...
Page 165: ...G REGULAR INSPECTIONS...
Page 169: ...H CAMERA HEAD MONITOR TV...
Page 174: ...H 5 External Operating Unit Fig H 2 910110...
Page 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Page 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Page 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Page 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Page 179: ...J MICROSCOPE MODEL DS...