DISCO DAD 2H/6T, Troubleshooting Manual

Page: 139 / 186

EXPLODED VIEW OF X-AXIS (360
°
THETA)
(F-3C)
Index
Number
Disco
Part No.
---
Description Remarks
Quantity
per Assy
1 MODDN005 --- Chuck Table(Universal) 1
2 MODDX092 --- Seal Cup 1
3 MADDX90201 ---
Theta-Axis Assy(360
°
)
1set
4 MODDX123 --- Cover 1
5 MSCO0562AN --- “O” Ring S-135 1
6 MGSK-M0306U --- Fil Hd Screw M3 x 6 20
7 MODDX130 --- Protect Ring 1
8 MODDX121 --- Ring(Top) 1
9 MODDX127 --- Bell Seal 2
10 MSCO0558AN --- “O” Ring S-120 2
11 MODDX120 --- Fixing Ring 1
12 MODDX122 --- Ring(Bottom) 1
13 MGSSM04020U --- Soc Hd Screw M4 x 20 6
14 MODDX117 --- Rotating Ring 1
15 MODDX068 --- Ring 1
16 MODDX073 --- Retainer 1
17 MODDX009 --- Steel Ball 10
18 MODDX075 --- Leaf Spring 1
19 MGNK-M0206U --- Bind Hd Screw M2 x 6 6
20 MODDX084 --- Bearing
NTB85110
1
21 MODDX114 --- Plate(Spring) 2
22 MODDX115 --- Leaf Spring 1
23 MODDX112 --- Hold Ring 1
24 MSCO0565AN --- “O” Ring S-150 1
25 MODDX131 --- Outer Housing 1
900830