EXPLODED VIEW OF X-AXIS (90
°
THETA)
(F-3A)
Index
Number
Disco
Part No.
---
Description
Remarks
Quantity
per Assy
26
MGSSM03018U
---
Soc Hd Screw
M3 x 18
3
27
MODDXA72
---
Thrust Needle Bearing
NTB80105
1
28
MODDX133
---
Slide Cap
1
29
MODDX083
---
Thrust Needle Bearing
1
30
MODDX134
---
Slide Plate
1
31
MGSSM03008U
---
Soc Hd Screw
M3 x 8
12
32
MODDX004
---
Harmonic Drive Component
1set
33
MODDX132
---
Support(Drive)
1
34
MGSSM04016U
---
Soc Hd Screw
M4 x 16
12
35
MGSSM04006U
---
Soc Hd Screw
M4 x 6
1
36
MODDXA69
---
Inner Housing
1
37
MGSK-M0310U
---
Fil Hd Screw
M3 x 10
1
38
AJGXL-12F
---
Magnetic Switch
GXL-12F
1set
39
MODDX143
---
Sensor Bracket
1
40
MGSSM04010U
---
Soc Hd Screw
M4 x 10
26
41
MODDXA70
---
Bracket
2
42
MODDXA68
---
Table Base
1
43
MODDX908
---
Stepping Motor Assy
1set
44
MODDX106
---
Stteping Motor
PH566-A-Q1
1
45
MODDX094
---
Adjust Ring
3
46
KDMOX12P057
---
Nylon Connector
1360P-1
2
47
SBEE-SG3MC
---
Photo Interrupter
EE-SG3MC
3sets
48
MGSSM03010U
---
Soc Hd Screw
M3 x 10
8
49
MODDX138
---
Sensor Holder
3
50
MODDXA84
---
Sensor Base
1
900830
Summary of Contents for DAD 2H/6T
Page 5: ...INTRODUCTION...
Page 7: ...A GENERAL...
Page 9: ...B CONSTRUCTION...
Page 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Page 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Page 13: ...C CIRCUIT DIAGRAM...
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Page 72: ...EAUA 087600...
Page 74: ...EAUA 087703...
Page 76: ...EAUA 087800 X Y EAUA 087900 Z...
Page 78: ...EAUA 023600...
Page 81: ...D MAINTENANCE...
Page 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Page 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Page 117: ...F ILLUSTRATION AND PARTS LIST...
Page 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Page 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Page 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Page 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Page 137: ...MEMO...
Page 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Page 141: ...MEMO...
Page 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Page 144: ...EXPLODED VIEW OF Y AXIS F 4...
Page 148: ...EXPLODED VIEW OF Z AXIS F 5...
Page 154: ...EXPLODED VIEW OF PIPING A F 6...
Page 156: ...EXPLODED VIEW OF PIPING B F 7...
Page 165: ...G REGULAR INSPECTIONS...
Page 169: ...H CAMERA HEAD MONITOR TV...
Page 174: ...H 5 External Operating Unit Fig H 2 910110...
Page 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Page 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Page 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Page 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Page 179: ...J MICROSCOPE MODEL DS...