EXPLODED VIEW OF X-AXIS (90
°
THETA)
(F-3A)
Index
Number
Disco
Part No.
---
Description
Remarks
Quantity
per Assy
75
MODDX044
---
Bracket(X Sensor P.C.B)
1
76
MGSSM05010U
---
Soc Hd Screw
M5 x 10
2
77
MODDHA66
---
Plate(P.C.B)
1
78
MODDX913
---
X-Axis Assy
1set
79
MGSSM06025U
---
Soc Hd Screw
M6 x 25
6
80
MODDX147
---
Table(Slide, X-Axis)
1
81
MODDXG18
---
Screw(Adjust)
4
82
MODDX090
---
Recirculate Bearing
2sets
83
MODDX091
---
Rail
2
84
MGSSM05020U
---
Soc Hd Screw
M5 x 20
14
85
MODDX142
---
Guide(Rail)
1
86
MGPT-0630U
---
Dowel Pin
6 x 30
2
87
MGSSM06030U
---
Soc Hd Screw
M6 x 30
8
88
MODDX022
---
Belt Guide
2
89
MODDX023
---
Belt Support
2
90
MGPS-2.512U
---
Slip Pin
2.5 x 12
1
91
MODDX025
---
Pulley(Timing)
12XL037-6F
1
92
MGSVKM0310U
---
Set Screw
M3 x 10
3
93
MSRF1960ZZ-M
---
Miniature Ball Bearing
RF-1960 ZZ
2
94
MODDX102
---
Case(Bearing)
1
95
MODDX103
---
Shaft
1
96
MGSUKM0410U
---
Set Screw
M4 x 10
1
97
MODDX030
---
Timing Pulley
36XL037-6F
1
98
MGPS-0320U
---
Slip Pin
3 x 20
1
99
MODDX031
---
Timing Belt
110XL037
1
900830
Summary of Contents for DAD 2H/6T
Page 5: ...INTRODUCTION...
Page 7: ...A GENERAL...
Page 9: ...B CONSTRUCTION...
Page 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Page 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Page 13: ...C CIRCUIT DIAGRAM...
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Page 72: ...EAUA 087600...
Page 74: ...EAUA 087703...
Page 76: ...EAUA 087800 X Y EAUA 087900 Z...
Page 78: ...EAUA 023600...
Page 81: ...D MAINTENANCE...
Page 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Page 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Page 117: ...F ILLUSTRATION AND PARTS LIST...
Page 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Page 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Page 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Page 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Page 137: ...MEMO...
Page 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Page 141: ...MEMO...
Page 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Page 144: ...EXPLODED VIEW OF Y AXIS F 4...
Page 148: ...EXPLODED VIEW OF Z AXIS F 5...
Page 154: ...EXPLODED VIEW OF PIPING A F 6...
Page 156: ...EXPLODED VIEW OF PIPING B F 7...
Page 165: ...G REGULAR INSPECTIONS...
Page 169: ...H CAMERA HEAD MONITOR TV...
Page 174: ...H 5 External Operating Unit Fig H 2 910110...
Page 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Page 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Page 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Page 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Page 179: ...J MICROSCOPE MODEL DS...