E-9
CLASSIFICATION
SYMPTOM
CAUSES
3. Manual
Operation
(Continued)
3-6.
Z-axis does not move upward to the upper
limit, even if EM STOP is selected.
3-6.
(1)
Same as in the case of X-axis.
3-7.
Spindle does not rotate, even if SPINDLE
switch is turned on.
3-7.
(1)
Defective Panel Switch.
(2)
Defective I/O P.C. Board.
(3)
Defective
Inverter.
(Refer
to
items
concerning inverter.)
(4)
Defective cable connected to inverter.
3-8.
Sucking operation is not performed, even if
VACUUM is turned on.
3-8.
(1)
Defective Panel Switch.
(2)
Defective I/O P.C. Board.
(3)
Defective Magnetic Valve or Connecting
Cable.
3-9.
Air is not blown off, even if VACUUM is
turned off.
3-9.
(1)
Defective I/O P.C. Board.
(2)
Defective Magnetic Valve or Connecting
Cable.
3-10.
Illumination lamp does not light, even if
ILLUMINATION is turned on.
3-10.
(1)
Defective Panel Switch.
(2)
Defective I/O P.C. Board.
(3)
Defective cable connected to the Inverter.
(4)
Defective Inverter.
(5)
Defective Cable Connecting Inverter and
Lamp.
(6)
Lamp Filament is broken.
891110
Summary of Contents for DAD 2H/6T
Page 5: ...INTRODUCTION...
Page 7: ...A GENERAL...
Page 9: ...B CONSTRUCTION...
Page 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Page 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Page 13: ...C CIRCUIT DIAGRAM...
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Page 72: ...EAUA 087600...
Page 74: ...EAUA 087703...
Page 76: ...EAUA 087800 X Y EAUA 087900 Z...
Page 78: ...EAUA 023600...
Page 81: ...D MAINTENANCE...
Page 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Page 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Page 117: ...F ILLUSTRATION AND PARTS LIST...
Page 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Page 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Page 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Page 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Page 137: ...MEMO...
Page 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Page 141: ...MEMO...
Page 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Page 144: ...EXPLODED VIEW OF Y AXIS F 4...
Page 148: ...EXPLODED VIEW OF Z AXIS F 5...
Page 154: ...EXPLODED VIEW OF PIPING A F 6...
Page 156: ...EXPLODED VIEW OF PIPING B F 7...
Page 165: ...G REGULAR INSPECTIONS...
Page 169: ...H CAMERA HEAD MONITOR TV...
Page 174: ...H 5 External Operating Unit Fig H 2 910110...
Page 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Page 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Page 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Page 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Page 179: ...J MICROSCOPE MODEL DS...