D-1
891110
D. MAINTENANCE
1. Maintenance and Inspection
1)
Be sure to wipe off water that has been sprinkled on the chuck table and operating panel after every use of
the machine.
2)
Remove wafer chips accumulated around the scupper of the water tray.
3)
Do not place tools and the like on the stainless waterproof cover in order to prevent the cover from being
scratched.
4)
Open and close the main body cover gently to protect it from impact damage.
5)
Care should be taken not to scratch the surface of the wheel mount fitted into the front end of the spindle.
6)
Replace the carbon brushes by loosening the screws at the rear of the spindle. After replacing the brushes
use a volt ohm meter to check the conductor rate between the main body and the front end of the spindle.
7)
The chuck table is provided with grooves and holes for better suction effect. Since vacuum is not obtainted
if these are clogged with chips, they should be cleaned from time to time.
8)
The timing belt for driving X axis should be inspected for scratches or cracks from time to time.
9)
The mist separator should be checked monthly. When the felt inside the mist separator becomes dirty, it
should be replaced.
10)
If this machine is left unused for a long time, wipe off water on each part of the equipment and place a
vinyl cover over it. (Under favorable circumstances, a vinyl cover is not necessary.)
Summary of Contents for DAD 2H/6T
Page 5: ...INTRODUCTION...
Page 7: ...A GENERAL...
Page 9: ...B CONSTRUCTION...
Page 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Page 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Page 13: ...C CIRCUIT DIAGRAM...
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Page 72: ...EAUA 087600...
Page 74: ...EAUA 087703...
Page 76: ...EAUA 087800 X Y EAUA 087900 Z...
Page 78: ...EAUA 023600...
Page 81: ...D MAINTENANCE...
Page 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Page 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Page 117: ...F ILLUSTRATION AND PARTS LIST...
Page 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Page 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Page 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Page 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Page 137: ...MEMO...
Page 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Page 141: ...MEMO...
Page 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Page 144: ...EXPLODED VIEW OF Y AXIS F 4...
Page 148: ...EXPLODED VIEW OF Z AXIS F 5...
Page 154: ...EXPLODED VIEW OF PIPING A F 6...
Page 156: ...EXPLODED VIEW OF PIPING B F 7...
Page 165: ...G REGULAR INSPECTIONS...
Page 169: ...H CAMERA HEAD MONITOR TV...
Page 174: ...H 5 External Operating Unit Fig H 2 910110...
Page 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Page 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Page 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Page 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Page 179: ...J MICROSCOPE MODEL DS...