i
CONTENTS
INTRODUCTION
page
A. GENERAL
Symbol letter ..............................................................................................................................................A-1
B. CONSTRUCTION
1. Composition and Arrangement of Mechanical Equipment.....................................................................B-1
2. Composition and Arrangement of Electrical Equipment ........................................................................B-2
3. Pneumatic, Water Schematic Diagram ...................................................................................................B-3
C. CIRCUIT DIAGRAM
Block Diagram............................................................................................................................................C-1
Machine Wiring Diagram (1/6) ..................................................................................................................C-2
Machine Wiring Diagram (2/6) (2H/6T 90°)..............................................................................................C-3
Machine Wiring Diagram (3/6) (2H/6T 360°)............................................................................................C-4
Machine Wiring Diagram (4/6) (2H/6TM).................................................................................................C-5
Machine Wiring Diagram (5/6) ..................................................................................................................C-6
Machine Wiring Diagram (6/6) ..................................................................................................................C-7
Control Unit Wiring Diagram.....................................................................................................................C-8
Control Unit Wiring Diagram.....................................................................................................................C-9
Control Unit Wiring Diagram...................................................................................................................C-10
DC Power Unit .........................................................................................................................................C-11
CPU ..........................................................................................................................................................C-12
Input/Output .............................................................................................................................................C-13
(Not Assigned)..........................................................................................................................................C-14
Driver Control-1, 2 (X, Y, Z,
θ
) ...............................................................................................................C-15
Driver (X, Y, Z,
θ
)....................................................................................................................................C-16
Spindle Inverter ........................................................................................................................................C-17
(Not Assigned)..........................................................................................................................................C-18
(Not Assigned)..........................................................................................................................................C-19
(Not Assigned)..........................................................................................................................................C-20
(Not Assigned)..........................................................................................................................................C-21
(Not Assigned)..........................................................................................................................................C-22
(Not Assigned)..........................................................................................................................................C-23
(Not Assigned)..........................................................................................................................................C-24
891110
Summary of Contents for DAD 2H/6T
Page 5: ...INTRODUCTION...
Page 7: ...A GENERAL...
Page 9: ...B CONSTRUCTION...
Page 11: ...B 2 2 Composition and Arrangement of Electrical Equipment Fig B 2 910810 910810...
Page 12: ...B 3 891110 3 Pneumatic Water Schematic Diagram Fig B 3 891110...
Page 13: ...C CIRCUIT DIAGRAM...
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Page 72: ...EAUA 087600...
Page 74: ...EAUA 087703...
Page 76: ...EAUA 087800 X Y EAUA 087900 Z...
Page 78: ...EAUA 023600...
Page 81: ...D MAINTENANCE...
Page 83: ...E CHECKING PROCEDURES FOR TROUBLESHOOTING...
Page 110: ...E 27 Fig E 3 Output Waveform of Driver P C Board 840920...
Page 117: ...F ILLUSTRATION AND PARTS LIST...
Page 118: ...EXPLODED VIEW OF MAIN BODY A F 1...
Page 124: ...EXPLODED VIEW OF MAIN BODY B F 2...
Page 128: ...EXPLODED VIEW OF X AXIS 90 THETA F 3A...
Page 134: ...EXPLODED VIEW OF X AXIS MANUAL THETA F 3B MODEL DAD 2H 6TM...
Page 137: ...MEMO...
Page 138: ...EXPLODED VIEW OF X AXIS 360 THETA F 3C...
Page 141: ...MEMO...
Page 142: ...EXPLODED VIEW OF X AXIS F 3D MODEL DAD 2H 6T...
Page 144: ...EXPLODED VIEW OF Y AXIS F 4...
Page 148: ...EXPLODED VIEW OF Z AXIS F 5...
Page 154: ...EXPLODED VIEW OF PIPING A F 6...
Page 156: ...EXPLODED VIEW OF PIPING B F 7...
Page 165: ...G REGULAR INSPECTIONS...
Page 169: ...H CAMERA HEAD MONITOR TV...
Page 174: ...H 5 External Operating Unit Fig H 2 910110...
Page 175: ...H 6 Camera Head Internal Adjusters VIDEO PWB Fig H 3 891110...
Page 176: ...H 7 Monitor Internal Adjuster PROCESS PWB 891110 Fig H 4...
Page 177: ...H 8 Internal Monitor Adjusters MONITOR PWB 891110 Fig H 5...
Page 178: ...H 9 Internal Monitor Adjuster POWER SUPPLY PWB Fig H 6 891110...
Page 179: ...J MICROSCOPE MODEL DS...