
MNL000447.doc
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09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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8.4.2 Rough Line Evacuation Procedure
This procedure purges hazardous gas from the selected Line 1 and the process
line to the tool. Its purpose is to remove the major portion of the hazardous gas
in the process line through the vent system of the Distribution System.
The Rough Line Evacuation Procedure does
not remove hazardous gas from the process
line to non‐hazardous levels required for
maintenance operations. A manual purge of
the Line 1 and process line through the tool
must be completed prior to any maintenance
operations.
1.
Verify that the appropriate valves at the process tool have been closed to
isolate the process line from the process tool gas panel.
2.
Touch anywhere on the graphics portion of the screen and enter the password.
3.
Using the dropdown menu on the Main Menu screen,
highlight the Line you want to operate.
4 From the Main Menu, select "START ROUGH
LINE".
5.
Went prompted by the Confirm Sequence Start
Window, hit “CONFIRM”.
6.
“ROUGH LINE" will appear in the appropriate Line
status box at the top of the screen.
7.
Follow prompted manual steps on the screen.