No. SX-DSV03224-84-
R6.0
Motion Control Business Unit, Panasonic Corporation
9-7 Compliance with SEMI F47 instantaneous stop standard
• The SEMI F47 standard includes requirements for voltage drop in semiconductor manufacturing equipment.
• The control power supply for the servo driver is applicable to the SEMI F47 standard.
The main circuit power supply is applicable to the SEMI F47 standard in the case of no load or light load.
(Cautions)
[1] This shall not apply to the single-phase 100 V servo driver whose control power input is 24 VDC.
[2] Make sure to verify the evaluation for the SEMI F47 standard using the actual equipment.
9-8 Harmonic suppression measures
Harmonic suppression measures are different depending on countries.
Perform installation in accordance with regulations in each country.
• The servo driver for Japan whose input current exceeds 20 A is applicable to the “Guidelines for harmonic
suppression measures for users who receive high-voltage or extra-high voltage power”.
Calculate the equivalent capacity and harmonic outflow current based on the guidelines.
If the harmonic current exceeds the limit value predetermined for the contract demand,
appropriate measures must be taken.
When calculating the equivalent capacity, assume that the conversion factor of the servo driver is K
31
=3.4.
(Refer to JEM-TR210 and JEM-TR225*.)
* They are technical documents issued by JEMA (Japan Electrical Manufacture’s Association).
