
Chapter Eight: Troubleshooting
Troubleshooting Chart
86
MFC output shows large
overshoot
Inlet pressure too high
Decrease inlet pressure
MFC not programmed for
correct gas - actual gas used
different
Check MFC active gas using digital
interface or Ethernet GUI
MFC control parameters set
incorrectly
Contact MKS service center
MFC output slow to
respond to setpoint
Inlet pressure too low
Increase inlet pressure
MFC not programmed for
correct gas - actual gas used
different
Check MFC active gas using digital
interface or Ethernet GUI
MFC control parameters set
incorrectly
Contact MKS service center
Output signal > zero with
confirmed zero flow
condition
MFC device zero offset
Re-zero device per instruction
manual
Fault in valve adjustment, gap
between plug & orifice
Contact MKS service center
Pressure output signal
different than confirmed
line pressure
Zero offset in pressure
transducer
Re-zero pressure transducer using
known pressure standard & Ethernet
GUI
Pressure output signal is
0
Closed upstream pneumatic
valve
Open valve
Closed or faulty regulator
Check regulator for proper
operations
Upstream clog filter
Measure pressure drop across filter
to spec, replace if necessary
No gas supply
Turn on gas source
Содержание P9B
Страница 1: ...1042936 001 Rev A January 2013 MKS Type P9B Digital Mass Flow Controller Instruction Manual...
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Страница 23: ...13 MKS Instruments Inc MKS Calibration and Service Center...
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Страница 26: ...16 MKS Instruments Inc MKS MKS Calibration and Service Center...
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Страница 56: ...Chapter Four Analog and Digital Interface Digital Interface Input and Output Options 46...
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Страница 68: ...Chapter Five Ethernet Interface Setup and Configuration Digital Interface Input and Output Options 58...
Страница 86: ...Chapter Six Embedded Web Based GUI and Diagnostics Tuning the MFC for Optional PC 76...
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Страница 105: ...Appendix A Product Specifications Electrical Specifications 95...
Страница 111: ...Model Code Description 101...
Страница 112: ...Model Code Description Appendix C Health and Safety Form 102 Appendix C Health and Safety Form...