MKS P9B, Инструкция по эксплуатации, Страница: 7 / 112

List of References
iii
List of Figures
Figure 1: 4-VCR Front View - (Normally Closed Valve) ................................................................................ 28
Figure 2: 4-VCR DeviceNet Inlet End (Left) and Outlet End (Right) Views - (Normally Closed Valve) ....... 28
Figure 3: 4-VCR Inlet End - 15 pin D and 9 pin D Views (Normally Closed Valve) ...................................... 29
Figure 4: 4-VCR Bottom View ......................................................................................................................... 29
Figure 5: C or W Seal Side View – Normally Closed ...................................................................................... 30
Figure 6: C or W Seal DeviceNet Inlet End (Left) and Outlet End (Right) Views – Normally Closed Valve . 30
Figure 7: C and W Seal Bottom View .............................................................................................................. 31
Figure 8: 4-VCR DeviceNet Top View ........................................................................................................... 31
Figure 9: 4-VCR 9 pin D and 15 pin D Top View ........................................................................................... 31
Figure 10: Serial Number Label (sample) ......................................................................................................... 31
Figure 11: Devicenet MAC ID Switches .......................................................................................................... 33
Figure 12: DeviceNet Connector Pin Diagram ................................................................................................. 40
Figure 13: Devicenet Baud Rate Switch ............................................................................................................ 42
Figure 14: Devicenet MAC ID Switches .......................................................................................................... 42
Figure 15: RS485 Baud Rate Switch ................................................................................................................ 45
Figure 16: RS485 MACID Switches ................................................................................................................ 45
Figure 17: Embedded GUI, MFC Device Page in Monitor Mode .................................................................... 60
Figure 18: Embedded GUI, Plot Page in Monitor Mode .................................................................................. 61
Figure 19: Embedded GUI, Diagnostics Page .................................................................................................. 63
Figure 20: Embedded GUI, Configuration Page in Monitor Mode .................................................................. 64
Figure 21: Setup Mode (Configuration Page) ................................................................................................... 65
Figure 22: Embedded GUI, Device Page in Setup Mode ................................................................................. 66
Figure 23: Embedded GUI, Creating A New Gas Instance .............................................................................. 67
Figure 24: Changing the Full Scale Flow Range .............................................................................................. 67
Figure 25: Embedded GUI, Plot Page in Setup Mode ...................................................................................... 68
Figure 26: Embedded GUI, Configuration Page in Setup Mode ...................................................................... 69
Figure 27: Embedded GUI, Optional PC Page in Setup Mode (15 pin D Analog Only) ................................. 71
Figure 28: Embedded GUI, Plot Page with Enabled Optional Input (15 pin D Analog Only) .......................... 72
Figure 29: Effects of the Proportional Control .................................................................................................. 73
Figure 30: Effects of the Integral Control .......................................................................................................... 74