
WARRANTY
Type P9B Mass Flow Controller
MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipment
described above (the “equipment”) manufactured by MKS shall be free from defects in materials and
workmanship.
For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS
will, at its option, either repair or replace any part which is defective in materials or workmanship without
charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any
breach of MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by
the purchaser, shall make specific written arrangements with respect to the responsibility for shipping the
equipment and handling any other incidental charges with the MKS Sales Representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home
office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used in accordance with the
specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be
liable under any circumstances for indirect, special, consequential, or incidental damages in connection with,
or arising out of, the sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically (typically) every 6 to
12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-calibration it
is considered normal preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR
IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED
WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST
INFRINGEMENT OF ANY PATENT.
Содержание P9B
Страница 1: ...1042936 001 Rev A January 2013 MKS Type P9B Digital Mass Flow Controller Instruction Manual...
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Страница 23: ...13 MKS Instruments Inc MKS Calibration and Service Center...
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Страница 26: ...16 MKS Instruments Inc MKS MKS Calibration and Service Center...
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Страница 56: ...Chapter Four Analog and Digital Interface Digital Interface Input and Output Options 46...
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Страница 68: ...Chapter Five Ethernet Interface Setup and Configuration Digital Interface Input and Output Options 58...
Страница 86: ...Chapter Six Embedded Web Based GUI and Diagnostics Tuning the MFC for Optional PC 76...
Страница 92: ...Chapter Seven Maintenance Pressure Zero Adjustment 82 This page intentionally left blank...
Страница 99: ...Troubleshooting Chart Chapter Eight Troubleshooting 89 This page intentionally left blank...
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Страница 105: ...Appendix A Product Specifications Electrical Specifications 95...
Страница 111: ...Model Code Description 101...
Страница 112: ...Model Code Description Appendix C Health and Safety Form 102 Appendix C Health and Safety Form...