MKS P9B, Инструкция по эксплуатации, Страница: 101 / 112

Appendix A: Product Specifications Performance Specifications –P9B
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Appendix A: Product Specifications
Performance Specifications –P9B
Full Scale Flow (N2 equivalent) 5-50000 sccm
Maximum Inlet Pressure 150 psig, limited to maximum differential pressure across MFC.
Normal Operating Pressure Differential (with atmospheric
pressure at the MFC outlet) 10 to 5000 sccm, 10 to 40 psid
10000 to 30000 sccm 15 to 40 psid
50000 sccm 25 to 40 psid
Proof Pressure 1000 psig
Burst Pressure 1500 psig
Control Range 2% to 100% of F.S.
Flow Accuracy

1% of setpoint for > 20 to 100% F.S.

0.2% of FS for 2 to 20% F.S.
Flow Repeatability 
0.3% of Reading
Flow Resolution 0.1% of Full Scale
Temperature Coefficients
Zero
Span
<0.05% F.S./

C
<0.08% Reading/

C
Inlet Pressure Coefficient < 0.02% of Reading./psi
Pressure Sensitivity Less than 5% flow perturbation from 20 to 100% of FS when
subject to a pressure transient of 2 psi
Typical Controller Settling Time (per SEMI Guideline E17-
0600) ~ 750 milliseconds typical above 5% F.S.
Pressure Reading 1 to 100 psia +/- 1% of Full Scale of 100 psia
Warm-Up Time
(to within 0.2% of F.S. of steady state performance) < 30 min.
Normal Operating Temperature Range
10

C to 50

C
Storage Humidity 0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20

C to 65

C (-4

F to 149

F)
Temperature Display Range
0 to 100

C
Temperature Readout Units 
C
Temperature Accuracy

2

C
Temperature Resolution
0.1

C
ROHS Compliant Yes
Specifications are subject to change without notice.