MKS P9B, Инструкция по эксплуатации, Страница: 102 / 112

Specifications are subject to change without notice.
Mechanical Specifications Appendix A: Product Specifications
92
Mechanical Specifications
Fittings (compatible with) Swagelok, 4 VCR, 1-1/8” surface mount (C-seal, W-seal)
Display 4 digits for value, 4 characters for unit
Leak Integrity
External (scc/sec He)
Through closed valve
< 1 x 10
-10
< 1.0% for F.S. at 25 psig inlet to atmosphere
Wetted Materials
Standard
316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality),
316 S.S. , Inconel, KM-45, PTFE
Surface Finish
10

inches, average Ra
Weight ≤ 3 lbs (1.4 kg)
Electrical Specifications
Analog I/O
Input Voltage Required
Max current at start-up (first 5 sec.)
Typical current at steady state +15 to +25 VDC
15VDC (±5 %) @ 350 mA
15VDC (±5 %) @ 280 mA
Set Point Command Signal 0 to 5 VDC
Flow Output Signal 0 to 5 VDC
Output Impedance
< 1 Ω
Connectors
15-pin Type “D”, 9-pin Type “D”