
Chapter Six: Embedded Web-Based GUI and Diagnostics
Setup Mode
70
Zeroing the MFC
For the P9B MFC there are “Zero Flow” and “Zero Pressure” options. Before zeroing the value make sure the
“Zero Adjustment” procedure on page 73 has been followed correctly. To zero the flow, press the “Zero
Flow” button. A green banner across the top of the page will tell you if the device received the command and
is processing. Zeroing typically will take (10) seconds. The MFC will be unresponsive during this time.
Caution
Zeroing the flow incorrectly can cause system failure. Make sure that the “Zero
Adjustment” procedure on page 73 is followed properly.
Note
The flow may also be zeroed by depressing the “Select” button on the top of the device’s
enclosure for two (2) seconds.
Changing the Setup Mode Password
To change the “Setup Mode” password from the default password “config,” one can do so on the Configure
page by entering a new password and reentering it followed by hitting the Submit button.
Changing the Ethernet (TCP/IP) Settings
The TCP/IP section allows you to change the IP Address, Subnet Mask, and Default Gateway for the MFC.
Caution
If you are unfamiliar with setting TCP/IP settings for the MFC, please contact your
company’s IT personnel or local MKS representative for help. If settings are done
incorrectly, you may no longer be able to connect to the MFC over Ethernet.
To set a new IP Address, enter in the IP address and press the “Submit” button. Pressing the “Reset” button
will reset the entry fields to what was in them prior to you making any changes. For the new IP address to
take effect the power to the MFC must be cycled. To use the Embedded GUI, you must now change the URL
to reflect the new IP address, e.g. http://xx.xx.xx.xx, where xx.xx.xx.xx is the new IP address for the MFC.
Updating Firmware
Updating firmware is the responsibility of your local MKS representative. If any updates are “necessary”,
then your local representative will be in contact to set up a time to complete the upgrade. Please note that a
“necessary” update is one that is deemed “Critical” by the factory.
Optional Input Page (Analog 15 pin D Devices Only)
The Optional Input page is only available in Setup Mode for Analog 15-Pin devices. Here the MFC can be
setup to control to an external signal, e.g. a Baratron capacitance manometer to control pressure. The external
signal full scale input voltage can be set to 5 VDC or 10 VDC, and the TCP/IP settings can be viewed. Figure
27, below, shows a screen shot of this page.
Note
Once the Optional Input is enabled, any setpoint sent to the device will cause the device to
control relative to the external signal input. To set the device so that it controls to its own
internal sensor the optional input must be disabled.
Содержание P9B
Страница 1: ...1042936 001 Rev A January 2013 MKS Type P9B Digital Mass Flow Controller Instruction Manual...
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Страница 23: ...13 MKS Instruments Inc MKS Calibration and Service Center...
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Страница 56: ...Chapter Four Analog and Digital Interface Digital Interface Input and Output Options 46...
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Страница 68: ...Chapter Five Ethernet Interface Setup and Configuration Digital Interface Input and Output Options 58...
Страница 86: ...Chapter Six Embedded Web Based GUI and Diagnostics Tuning the MFC for Optional PC 76...
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Страница 105: ...Appendix A Product Specifications Electrical Specifications 95...
Страница 111: ...Model Code Description 101...
Страница 112: ...Model Code Description Appendix C Health and Safety Form 102 Appendix C Health and Safety Form...