
Chapter Eight: Troubleshooting
Troubleshooting Chart
84
MFC shows 0 flow when
given setpoint (cont’d)
MFC clogged sensor
Run MFC diagnostics. Verify MFC
inlet pressure, check valve current
for open valve condition and check
for gas flow downstream of MFC. If
flow present, possible clogged
sensor
MFC control circuit failure
Run MFC diagnostics. If error
results, contact MKS service center.
MFC shows output flow >
FS (overrange)
MFC valve full open
Check valve current for maximum
condition
Pressure drop across MFC is
greater than specification
Measure upstream pressure &
downstream pressure. Compare to
specification.
Faulty valve control
circuit/calibration
Run MFC diagnostics using Ethernet
GUI
Possible contamination in valve
assembly
Cycle-purge MFC to clear suspected
contamination
MFC output signal does
not match setpoint
Contamination
Check for partial block orifice or
sensor. Cycle purge MFC to clear
contaminant
MFC valve full open
Check valve current for maximum
condition
Inlet pressure too low
Increase inlet pressure
Outlet pressure too high
Decrease outlet pressure
Flow signal is not properly
grounded.
Check for ground loops.
Control electronics failure,
sensor failure
Run MFC diagnostics test
MFC output signal
oscillates
Inlet pressure oscillates
Check for faulty regulator
Inlet pressure too high
Lower inlet pressure
MFC nameplate gas not same
as actual gas
Check for programmed gas using
Ethernet GUI or digital interface.
Reprogram as necessary
Faulty control circuit
Run MFC diagnostic test.
Содержание P9B
Страница 1: ...1042936 001 Rev A January 2013 MKS Type P9B Digital Mass Flow Controller Instruction Manual...
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Страница 23: ...13 MKS Instruments Inc MKS Calibration and Service Center...
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Страница 26: ...16 MKS Instruments Inc MKS MKS Calibration and Service Center...
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Страница 56: ...Chapter Four Analog and Digital Interface Digital Interface Input and Output Options 46...
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Страница 68: ...Chapter Five Ethernet Interface Setup and Configuration Digital Interface Input and Output Options 58...
Страница 86: ...Chapter Six Embedded Web Based GUI and Diagnostics Tuning the MFC for Optional PC 76...
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Страница 105: ...Appendix A Product Specifications Electrical Specifications 95...
Страница 111: ...Model Code Description 101...
Страница 112: ...Model Code Description Appendix C Health and Safety Form 102 Appendix C Health and Safety Form...