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Chapter Three: Installation and Configuration Unpacking
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Chapter Three: Installation and Configuration
Unpacking
MKS has carefully packed your device so that it will reach you in perfect operating order. Upon receiving the
unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not
occurred during shipment.
Note
Do
not
discard any packing materials until you have completed your inspection and are sure the
unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to
MKS, obtain an RMA Number (Return Material Authorization Number) from the MKS Calibration and
Service Center before shipping. Please refer to the MKS website
http://www.mksinst.com/Service/ServiceHome.aspx for contact and additional information.
Opening the Package
Each device is assembled, leak tested with helium, and calibrated in a cleanroom environment. The
instrument is double-packaged in this environment to ensure maintenance of its particle free condition during
shipment. It is very important to remove the packaging according to good clean room practices. To maintain
at least a minimal level of clean room standards, follow the instructions below:
1. Remove all cardboard and packaging materials. Set aside before entering the garmenting room. Do not
discard until the device has been inspected for damage and determined to be in working order.
2. Remove the outer plastic shipping container in an ante room (garmenting room) or transfer box. Do not
allow this container to enter the clean room.
3. Remove the inner bag in the clean room.
4. Inspect for any damage.
5. Pass the original calibration sheet to the appropriate personnel at your company.
Caution Only qualified individuals should perform the installation and adjustments of the
MFC. Individuals must comply with all necessary ESD handling precautions while
installing and adjusting the instrument. Proper handling is essential when working
with all highly sensitive precision electronic instruments.
Unpacking Checklist
Standard Equipment:
MFC
Flow calibration sheet