MKS P9B, Инструкция по эксплуатации, Страница: 42 / 112

Chapter Three: Installation and Configuration Installation Procedure
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Mounting Hardware
P9B MFCs with in-line fittings (VCR) have four threaded mounting holes located on the bottom or base of
the unit: two #8-32 and two M4. Depending on the hole pattern chosen, use #8-32 UNC-2B or M4 hardware
to mount the instrument. The figures on the previous pages show the location and dimensions of the mounting
holes for standard axial fittings.
The P9B MFC’s C-Seal and W-Seal downmount fittings are designed for device mounting using four M5-0.8
x 30 mm long socket head cap screws. In addition, C-Seal units may be mounted using 10-32 UNF x 1.25”
long socket head cap screws if your mounting substrate requires.
Control Valve – Not a Shut-off Valve
The control valve is
not
a positive shutoff valve. Some leakage across the valve may occur. Refer to
Appendix A,
Product Specifications,
page 91, for the leak integrity specifications. If necessary, install a
separate positive shutoff valve in your system.
Note
Connect the MFC to your system so that the gas flows in the direction of the flow arrow on the
front of the unit.
Installation Procedure
Install the MFC
Note
DO NOT make any electrical connections to the MFC until directed to do so.
Note
Information on electrical connections (pinouts and settings) is found in Chapter 4.
1. The MFC is prepared for cleanroom installation.
Follow standard cleanroom practices to ensure a clean installation:
- discard outer material outside of the cleanroom
- remove the outer packaging in the gray area
- carry the MFC into the clean area then remove the inner bag and any protective fitting covers just prior
to installation. Remove plastic ethernet kit from inner plastic and DO NOT take them into clean room.
- Do not discard calibration sheet