MKS P9B, Инструкция по эксплуатации, Страница: 37 / 112

Product Location and Requirements Chapter Three: Installation and Configuration
27
Product Location and Requirements
Ventilation requirements include sufficient air circulation
Ambient operating temperature range: 10° to 50° C (50° to 122° F)
Power requirement: 11-25 VDC [320 mA maximum current @ 11 VDC
146 mA @ 24 VDC nominal)]
Storage temperature range: -20° to 80° C (-4° and 176° F)
Mount the MFC in an upright position if possible for easy viewing of the display, although any mounting
orientation is satisfactory.
Install a separate positive shutoff valve if your system cannot tolerate any leakage through the MFC. The
internal flow control valve is not a positive shutoff valve so some leakage across the valve may occur.
Warning
Your corporate policy on handling toxic or hazardous gases supersedes the
instructions in this manual. Comply with your corporate policy. MKS assumes no
liability for the safe handling of such materials.
Install the MFC in a “flowing” system where gas is continually added and evacuated. Do
not
use the
controller in a “dead-ended” system (a system which cannot remove excess mass). The MFC can not vent
excess mass to the atmosphere.
Warm up time: 30 minutes minimum (1 hour suggested to equilibrate with ambient environment)
Use high purity gas filters in line upstream of the device.
Observe the pressure limits for the flow device.
Controller:
Maximum gas inlet pressure is 150 psig with a properly configured valve (consult factory for cases
where inlet pressure is expected to exceed 40 psig).
Operationing differential pressure with atmosphere for standard valve configurations at the outlet is:

10 to 5000 sccm, 10 to 40 psid

10000 to 30000 sccm 15 to 40 psid

50000 sccm 35 to 40 psid
Valve configurations for low pressure drop applications are available. Please consult MKS for these
situations.
For additional information, refer to Appendix A,
Product Specifications
, page 91