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Table of Contents

 

i 

Table of Contents 

List of References ............................................................................................................................................... v

 

Mass Flow Device Safety Information ............................................................................................................. 1

 

Symbols Used in This Instruction Manual .................................................................................................................... 1

 

Symbols Found on the Unit ........................................................................................................................................... 1

 

Safety Procedures and Precautions ................................................................................................................................ 2

 

Sicherheitshinweise für das Massenflussgerät................................................................................................. 3

 

In dieser Betriebsanleitung vorkommende Symbole ..................................................................................................... 3

 

Erklärung der am Gerät angebrachten Symbole ............................................................................................................ 3

 

Sicherheitsvorschriften und Vorsichtsmaßnahmen ....................................................................................................... 4

 

Informations de sécurité pour appareils de mesure/contrôle de débit massique ......................................... 5

 

Symboles utilisés dans ce manuel d'utilisation .............................................................................................................. 5

 

Symboles figurant sur l'unité ......................................................................................................................................... 5

 

Mesures de sécurité et précautions ................................................................................................................................ 6

 

Medidas de seguridad del dispositivo de flujo de masa .................................................................................. 7

 

Símbolos usados en este manual de instrucciones ......................................................................................................... 7

 

Símbolos hallados en la unidad ..................................................................................................................................... 7

 

Procedimientos y precauciones de seguridad ................................................................................................................ 8

 

マスフロー機器の安全に関する情報

 ............................................................................................................ 11

 

本取扱説明書のマーク

 ............................................................................................................................................. 11

 

本機器のマーク

 ......................................................................................................................................................... 11

 

安全対策について

 ..................................................................................................................................................... 13

 

질량

 

유량

 

장치

 

안전

 

정보

 ................................................................................................................................ 15

 

본

 

지침

 

매뉴얼에

 

사용되는

 

기호들

 ......................................................................................................................... 15

 

장치에

 

표시된

 

기호들

 ............................................................................................................................................... 15

 

안전

 

절차

 

및

 

예방조치

 .............................................................................................................................................. 16

 

Chapter One:  General Information .............................................................................................................. 19

 

Introduction ................................................................................................................................................................. 19

 

How This Manual is Organized ................................................................................................................................... 20

 

Customer Support ........................................................................................................................................................ 21

 

Chapter Two:  Overview ................................................................................................................................. 23

 

General Information .................................................................................................................................................... 23

 

How the MFC Works .................................................................................................................................................. 24

 

Operation of the MFC with Gases other than Nitrogen ............................................................................................... 24

 

Chapter Three:  Installation and Configuration ........................................................................................... 26

 

Unpacking ................................................................................................................................................................... 26

 

Product Location and Requirements ............................................................................................................................ 27

 

Dimensions  - P9B ....................................................................................................................................................... 28

 

Serial Label.................................................................................................................................................................. 31

 

Installation Procedure .................................................................................................................................................. 32

 

Содержание P9B

Страница 1: ...1042936 001 Rev A January 2013 MKS Type P9B Digital Mass Flow Controller Instruction Manual...

Страница 2: ...tive or distributor from which the equipment was purchased or in the case of a direct purchase from MKS with the MKS home office in Andover Massachusetts USA This warranty does not apply to any equipm...

Страница 3: ...s Inc Printed in the United States of America Baratron and Mass Flo are registered trademarks of MKS Instruments Inc Andover MA DeviceNet is a trademark of Open DeviceNet Vendor Association Inc Coral...

Страница 4: ......

Страница 5: ...dans ce manuel d utilisation 5 Symboles figurant sur l unit 5 Mesures de s curit et pr cautions 6 Medidas de seguridad del dispositivo de flujo de masa 7 S mbolos usados en este manual de instruccion...

Страница 6: ...onitor Mode 59 Setup Mode 65 Tuning the MFC for Optional PC 73 Chapter Seven Maintenance 77 General Information 77 Recalibration 77 Flow Zero Adjustment 77 Pressure Zero Adjustment 79 Chapter Eight Tr...

Страница 7: ...aud Rate Switch 42 Figure 14 Devicenet MAC ID Switches 42 Figure 15 RS485 Baud Rate Switch 45 Figure 16 RS485 MACID Switches 45 Figure 17 Embedded GUI MFC Device Page in Monitor Mode 60 Figure 18 Embe...

Страница 8: ...la unidad 7 5 11 6 15 Table 7 MKS Interface Cables 35 Table 8 Analog Interface 9 Pin D Males Pinouts Model Code A 36 Table 9 Analog Interface 15 Pin D Males Pinouts Model Code B 37 Table 10 Digital In...

Страница 9: ...nt 2253C 6 Sensor Actuator Network Standard SEMI Standards Document E54 0097 7 SEMI E17 Guideline for Mass Flow Controller Transient Characteristics Tests 8 SEMI E18 Guideline for Temperature Specific...

Страница 10: ...List of References vi This page intentionally left blank...

Страница 11: ...TE sign denotes important information It calls attention to a procedure practice condition or the like which is essential to highlight Symbols Found on the Unit The following table describes symbols t...

Страница 12: ...ial USE PROPER PROCEDURES WHEN PURGING This instrument must be purged under a ventilation hood and gloves must be worn to protect personnel To purge this instrument properly it must be purged in both...

Страница 13: ...r tes f hren kann Hinweis Das Symbol HINWEIS macht auf wichtige Informationen bez glich eines Arbeitsablaufs einer Arbeitsweise eines Zustands oder einer sonstige Gegebenheit aufmerksam Erkl rung der...

Страница 14: ...er vor dem Ausbau aus einem System muss das Ger t unter Einsatz eines reinen Trockengases vollst ndig gesp lt werden um alle R ckst nde des Vorg ngermediums zu entfernen Anweisungen zum Sp len des Ger...

Страница 15: ...n partielle ou totale du produit en cas d ex cution incorrecte ou de non respect des consignes Remarque L indication REMARQUE signale une information importante Elle attire l attention sur une proc du...

Страница 16: ...retrait d un syst me purger l unit compl tement avec un gaz propre et sec afin d liminer toute trace du produit de flux utilis pr c demment UTILISATION DES PROC DURES APPROPRI ES POUR LA PURGE Cet ap...

Страница 17: ...parcial del equipo Nota El s mbolo de notas indica informaci n de importancia Este s mbolo pone de relieve un procedimiento pr ctica o condici n cuyo conocimiento es esencial destacar S mbolos hallado...

Страница 18: ...utilicen materiales t xicos es responsabilidad de los operarios tomar las medidas de seguridad correspondientes purgar totalmente el instrumento cuando sea necesario y comprobar que el material utiliz...

Страница 19: ...as de metal pueden da ar irreparablemente la unidad CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE TEMPERATURA Las unidades controladas por medio de temperatura funcionar n de acuerdo co...

Страница 20: ......

Страница 21: ...IEC 417 No 5008 IEC 417 No 5017 IEC 417 No 5019 IEC 417 No 5020 IEC 417 No 5021 IEC 417 No 5031 IEC 417 No 5032 IEC 417 No 5033 a 2 IEC 417 No 5172 a IEC 617 2 No 020206 ISO 3864 No B 3 1 ISO 3864 No...

Страница 22: ...12...

Страница 23: ...13 MKS Instruments Inc MKS Calibration and Service Center...

Страница 24: ...14...

Страница 25: ...EC 417 No 5008 IEC 417 No 5017 IEC 417 No 5019 IEC 417 No 5020 IEC 417 No 5021 IEC 417 No 5031 IEC 417 No 5032 IEC 417 No 5033 a II IEC 417 No 5172 a 3 IEC 617 2 No 020206 ISO 3864 No B 3 1 ISO 3864 N...

Страница 26: ...16 MKS Instruments Inc MKS MKS Calibration and Service Center...

Страница 27: ...17...

Страница 28: ...18...

Страница 29: ...l uptime through reduction of No Problem Found MFC replacements Includes embedded diagnostics software that allows users to check MFC functionality without removing the MFC E diagnostics through embed...

Страница 30: ...pressure or vacuum conditions relative to atmosphere The internal valve control plug is Teflon which is chemically stable and not prone to out gassing or particle generation The MFC s mechanical desig...

Страница 31: ...Material Authorization numbers expedite handling and ensure proper servicing of your instrument RMA numbers can be obtained by contacting the MKS Calibration and Service Center or through the MKS web...

Страница 32: ......

Страница 33: ...the gas stream passes first through the metering section of the instrument for its mass flow to be measured A pressure sensor upstream of the control valve senses the gas source pressure The gas moves...

Страница 34: ...e flow reading to the setpoint and positions the valve to maintain or achieve the setpoint rate The controller functions as a model based pressure insensitive flow controller Example Assume that your...

Страница 35: ...nverting the calibration gas flow into the flow of the gas being used This may lead to inaccuracy in the flow reported to levels as high as 6 10 of FS depending on the gas used The P9B by using these...

Страница 36: ...double packaged in this environment to ensure maintenance of its particle free condition during shipment It is very important to remove the packaging according to good clean room practices To maintai...

Страница 37: ...orate policy MKS assumes no liability for the safe handling of such materials Install the MFC in a flowing system where gas is continually added and evacuated Do not use the controller in a dead ended...

Страница 38: ...Three Installation and Configuration Dimensions P9B 28 Dimensions P9B Figure 1 4 VCR Front View Normally Closed Valve Figure 2 4 VCR DeviceNet Inlet End Left and Outlet End Right Views Normally Close...

Страница 39: ...Dimensions P9B Chapter Three Installation and Configuration 29 Figure 3 4 VCR Inlet End 15 pin D and 9 pin D Views Normally Closed Valve Figure 4 4 VCR Bottom View...

Страница 40: ...apter Three Installation and Configuration Dimensions P9B 30 Figure 5 C or W Seal Side View Normally Closed Figure 6 C or W Seal DeviceNet Inlet End Left and Outlet End Right Views Normally Closed Val...

Страница 41: ...pin D and 15 pin D Top View Serial Label Each MFC has one serial number label Each label shows the serial number the model code the full scale flow range and the calibration gas The label is located...

Страница 42: ...valve Some leakage across the valve may occur Refer to Appendix A Product Specifications page 91 for the leak integrity specifications If necessary install a separate positive shutoff valve in your sy...

Страница 43: ...hat are approved for your process Use appropriate size and material gaskets VCR or W seal or C seals for the application These are not included with the MFC Install the MFC and secure according to the...

Страница 44: ...Chapter Three Installation and Configuration Installation Procedure 34 Note The P9B MFC s scrolling display shows the IP address the Gas Type the Maximum Flow Rate and Active Gas Instance...

Страница 45: ...part number CB259S 5 Generic Shielded Cable Description MKS offers a full line of cables for most MKS equipment Should you choose to manufacture your own cables follow the guidelines listed below 1 Th...

Страница 46: ...to Open Pull to ground or apply 5 to 15 VDC to Close Pin 2 Flow Output Signal 0 5 VDC Pin 3 15 to 24 VDC Power Supply 5 about nominal supply Pin 4 Power Common See Note 2 below Pin 5 No Connection Pin...

Страница 47: ...al Input Pin 11 Signal Common Pin 12 Signal Common Pin 13 No Connection Pin 14 No Connection Pin 15 Chassis Ground Note 1 The No Connection pin assignment refers to a pin with no internal connection 2...

Страница 48: ...ntrol signal Although controlling to the external optional input signal the metered flow output signal is still provided on the standard output pin 2 Start Up Procedure for the Analog MFC 1 Leak test...

Страница 49: ...or closed independent of the setpoint command signal If the MFC is equipped with a 9 pin Type D connector To Open the valve apply 5 to 15 VDC to Pin 1 To Close the valve apply 5 to 15 VDC Low to Pin 1...

Страница 50: ...1 Drain 2 V 3 V 4 CAN_H 5 CAN_L Figure 12 DeviceNet Connector Pin Diagram Overview of MFC DeviceNet Digital Operation The P9B MFC DeviceNet Mass Flow Device complies with the ODVA DeviceNet Specificat...

Страница 51: ..._ID or bus off Dark Not powered Not online The device has not completed the Dup_MAC_ID test or the device is not powered check the module status LED DeviceNet Baud Rate and MAC ID Switches The baud ra...

Страница 52: ...Devicenet MAC ID Switches The valid MAC ID switch positions are 0 to 63 Use the switch on the left to set the most significant digit MSD that is the factor of ten 10 20 30 60 Use the switch on the ri...

Страница 53: ...ED remains OFF 4 The Module Status LED illuminates solid GREEN when initialization is completed 5 When the device establishes communication with other devices on the network the Network Status LED ill...

Страница 54: ...ion Pin 3 11 to 25 VDC Power In Pin 4 Power Return Pin 5 No Connection Pin 6 RS485 Return Pin 7 RS485 Pin 8 RS485 Pin 9 Shield RS485 Communications Protocol The MFC controller acts as a slave device o...

Страница 55: ...ress values Figure 15 RS485 Baud Rate Switch MAC ID Node Address Switches Two 10 position rotary switches shown below are used to set the MAC ID node address Figure 16 RS485 MACID Switches The MAC ID...

Страница 56: ...Chapter Four Analog and Digital Interface Digital Interface Input and Output Options 46...

Страница 57: ...access AND you are setting up multiple IP addresses then go to Option 3 For Multiple IP Address Setup on page 52 and skip the steps below The Multiple IP Address Setup procedure enables you to access...

Страница 58: ...n your computer o You have no need to connect to the Internet o You only have one IP address i e 192 168 2 X to connect with o If your computer has more than one network card this option may not work...

Страница 59: ...he CD command again if necessary This will bring you to the C prompt See the example below 6 Enter the command HostIP x y z where x stands for the IP address of your Host computer y stands for the sub...

Страница 60: ...The Serial Number can always be found in the bottom left hand corner of the browser window For more information on the web based program go to Chapter 6 on page Error Bookmark not defined Option 2 Man...

Страница 61: ...t Properties 4 Select Internet Protocol TCP IP then select Properties 5 Select Use the following IP address 6 Enter the IP address 192 168 0 10 Now click in the Subnet mask field and the Subnet mask 2...

Страница 62: ...he MFC you wish to connect to and click Go Internet Explorer will open and display the device Monitor screen which displays the device s gas settings model code valve type and Digital I O connection s...

Страница 63: ...Area Connection by doing one of the following options Option 5 1 Select My Network Places On Desktop typically Right Click on the icon then select Properties In the Network and Dial Up Connections wi...

Страница 64: ......

Страница 65: ...IP address the Subnet mask and the Default gateway fields with values returned from the ipconfig all query in the DOS command window o Select Use the following DNS server addresses o Type in the Prefe...

Страница 66: ...group Enter the Gateway value you will use to connect to the MFC Typically a gateway value will be the IP address with a 1 on the end The Metric value will always be 1 Then click Add You can use Autom...

Страница 67: ...will open and display the device Monitor screen which displays the device s gas settings model code valve type and Digital I O connection status if applicable The Serial Number can always be found in...

Страница 68: ...Chapter Five Ethernet Interface Setup and Configuration Digital Interface Input and Output Options 58...

Страница 69: ...true to its name Monitor Mode allows the user to only Monitor the MFC s performance aside from performing diagnostics In order to configure the MFC i e zero the device configure the PID parameters ch...

Страница 70: ...ust be installed on the computer trying to view the page can be downloaded by following the instructions listed on page 57 Selecting Variables To Plot On the right hand side of the Plot page you shoul...

Страница 71: ...Start Stop button you should see the Options section Here you are able to start stop the autoscrolling feature rescale the Y Axis rescale the X Axis or save the plot data to a file These options are d...

Страница 72: ...ng properly These tests are described in detail below Raw Flow this basic test is a simple diagnostic check for the flow circuit to verify that the sensor and the electronics are working properly To r...

Страница 73: ...displays the TCP IP settings and the current Firmware version for the MFC In Monitor Mode you are only able to view this information At the bottom of this page you are able to enter the password to c...

Страница 74: ...Chapter Six Embedded Web Based GUI and Diagnostics Monitor Mode 64 Figure 20 Embedded GUI Configuration Page in Monitor Mode...

Страница 75: ...tings button you will be directed to the Configuration Page in Setup Mode You should now a see a green banner that lines the top of the page that says The device is now in SETUP mode Each of the pages...

Страница 76: ...ate a new gas instance see page 66 To change the full scale range of the current gas instance see page 67 To set the MFC to a different gas instance see page 67 Creating A New Gas Instance Refer to Fi...

Страница 77: ...Scale sccm field and then press the Set button This operation typically takes less than 30 seconds Once completed you are ready to use the new gas settings Figure 24 Changing the Full Scale Flow Rang...

Страница 78: ...ernet will control the optional input Figure 25 Embedded GUI Plot Page in Setup Mode Before a MFC leaves the factory the performance is checked with Nitrogen in a typical application During this test...

Страница 79: ...ts features please see the Diagnostics Page section on page 62 Configuration Page Setup Mode As was noted earlier the Configuration Page is where you are initially directed once you ve entered Setup M...

Страница 80: ...If settings are done incorrectly you may no longer be able to connect to the MFC over Ethernet To set a new IP Address enter in the IP address and press the Submit button Pressing the Reset button wil...

Страница 81: ...u would put a value of 100 in this field To enter this value you must click the Submit button Optional Input This field reports back what the optional input device is reading Please note that this val...

Страница 82: ...MFC whether or not the Optional Input signal has a full scale voltage of 5 Volts or 10 Volts To change the voltage click the correct option box and then click the Submit button located directly above...

Страница 83: ...only the Proportional and the Integral term will be discussed These values can be adjusted through the Embedded GUI on the Plot Page in Setup Mode Each method is discussed in the Adjusting the Proport...

Страница 84: ...shows the effects of the Integral term Figure 30 Effects of the Integral Control The proportional control setting Ki has a minimum value of zero but no maximum value The factory shipped setting is fo...

Страница 85: ...values for the proportional control setting Kp the integral control setting Ki and the Optional Command Min Offset and change them To do this follow the steps listed below 1 Connect to the Embedded GU...

Страница 86: ...Chapter Six Embedded Web Based GUI and Diagnostics Tuning the MFC for Optional PC 76...

Страница 87: ...ically checked and reset if necessary All MFCs should be zeroed under actual installation conditions prior to use Very slight offsets in the zero condition can contribute to flow measurement inaccurac...

Страница 88: ...ol valve iv Allow pressure across MFC to equilibrate as flow output approaches zero and stabilizes v Close the MFC s control valve vi Wait one minute and adjust the zero using one of the methods speci...

Страница 89: ...heck your flow to verify zero has occurred You can also perform an explicit GET Service 0x0E on Class 0x31 Instance 1 Attribute 0x1C which is the Autozero Status This attribute s service data will equ...

Страница 90: ...not measured by the sensor itself pressure less than 0 01 psia 0 5 Torr a System has upstream and downstream positive shut off valves i Close the upstream valve ii Open the downstream valve iii Open...

Страница 91: ...Instance 1 Service Data attribute 0x0B You should get response data of 0x04 2 Send the Zero Adjust Service using S Analog Sensor Object Instance 2 Pressure The following DeviceNet Command Starts the...

Страница 92: ...Chapter Seven Maintenance Pressure Zero Adjustment 82 This page intentionally left blank...

Страница 93: ...Check power source measure voltage Contamination Clogged blocked MFC device or gas line Check inlet pressure MFC Check outlet pressure MFC using pressure gauge Check outlet pressure downstream of posi...

Страница 94: ...MFC diagnostics using Ethernet GUI Possible contamination in valve assembly Cycle purge MFC to clear suspected contamination MFC output signal does not match setpoint Contamination Check for partial b...

Страница 95: ...e MFC setpoint in counts than 100 FS of 24567 counts Program attributed 6 to 100 24567 counts 0x6000 Output signal matches setpoint higher flows but will not go to 0 MFC valve partial contamination Cy...

Страница 96: ...nterface or Ethernet GUI MFC control parameters set incorrectly Contact MKS service center Output signal zero with confirmed zero flow condition MFC device zero offset Re zero device per instruction m...

Страница 97: ...as detected an error that has rendered it incapable of communicating on the network Duplicate MAC ID or Bus off Flashing Red Connection Time Out One or more I O Connections are in the Timed Out state...

Страница 98: ...to configuration missing incomplete or incorrect Red Unrecoverable Fault The device has an unrecoverable fault may need replacing Flashing Red Minor Fault Recoverable Fault Flashing Red Green Device S...

Страница 99: ...Troubleshooting Chart Chapter Eight Troubleshooting 89 This page intentionally left blank...

Страница 100: ......

Страница 101: ...Resolution 0 1 of Full Scale Temperature Coefficients Zero Span 0 05 F S C 0 08 Reading C Inlet Pressure Coefficient 0 02 of Reading psi Pressure Sensitivity Less than 5 flow perturbation from 20 to 1...

Страница 102: ...1 x 10 10 1 0 for F S at 25 psig inlet to atmosphere Wetted Materials Standard 316L S S VAR equivalent to 316 S S SCQ for semiconductor quality 316 S S Inconel KM 45 PTFE Surface Finish 10 inches aver...

Страница 103: ...torage includes manufacturer information model and serial number original factory calibration software and hardware revision numbers Digital Functions temperature Set units Read temperature Alarm enab...

Страница 104: ...tance is to be used for flow metering Query for Calibration Instance Process Gas Selected Host controller will use this message to query the selected calibration instance which is currently being used...

Страница 105: ...Appendix A Product Specifications Electrical Specifications 95...

Страница 106: ...CCC Type P9B Mass Flow Controller multigas multi range pressure insensitive standard length CCC P9B Gas Code GGG Reference SEMI E52 Practice for Referencing Gases and Gas Mixtures Note Contact MKS Ap...

Страница 107: ...rofluoromethane R 21 065 CHCl2F Dichlorosilane 067 SiH2Cl2 1 2 Dichlorotetrafluoroethane R 114 125 C2Cl2F4 Difluoroethylene R 1132a 064 C2H2F2 Difluoromethane 160 CH2F2 Dimethylamine 085 C2H7N Dimethy...

Страница 108: ...124 MoF6 Neon 002 Ne Nitric Oxide 016 NO Nitrogen 013 N2 Nitrogen Dioxide 026 NO2 Nitrogen Trifluoride 053 NF3 Nitrosyl Chloride 141 NOCl Nitrous Oxide 027 N2O Octafluorocyclobutane R c318 129 C4F8 Ox...

Страница 109: ...6 C2Cl3F3 Trifluoromethane Fluoroform R 23 049 CHF3 Trimethoxyborine 131 C3H9BO3 Trimethylamine 109 C3H9N Tungsten Hexafluoride 121 WF6 Uranium Hexafluoride 123 UF6 Vinyl Bromide 056 C2H3Br Vinyl Chlo...

Страница 110: ...tor Type Ordering Code DeviceNet 6 Digital RS485 5 9 Pin D Analog I O A 15 Pin D Analog I O B Valve Z The valve option is designated by a single character code Valve Type Ordering Code Normally Closed...

Страница 111: ...Model Code Description 101...

Страница 112: ...Model Code Description Appendix C Health and Safety Form 102 Appendix C Health and Safety Form...

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