
Customer Support
Chapter One: General Information
21
Customer Support
Standard maintenance and repair services are available through all of the regional MKS Calibration and
Service Centers.
If any difficulties arise in the use of your device, or to obtain information about companion products MKS
offers, contact any authorized MKS Calibration and Service Center. If it is necessary to return the instrument
to MKS, then two actions must be completed before shipping: (1) a RMA (Return Material Authorization)
number must be obtained and (2) a Health and Safety Form must be completed and included with the
instrument.
Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or
toxic materials.
Obtaining a Return Material Authorization (RMA) Number
RMA (Return Material Authorization) numbers expedite handling and ensure proper servicing of your
instrument.
RMA numbers can be obtained by contacting the MKS Calibration and Service Center or through the MKS
website at:
http://www.mksinst.com/service/servicehowtoorder.aspx
.
Note
Returned instruments will not be accepted without a valid RMA number displayed on the
shipping container.
Health and Safety Form
A returned instrument will not be examined without a signed Health and Safety form indicating that the unit is
free of harmful materials.
The Health and Safety form can be obtained on the last page of this manual or through the MKS website at:
http://www.mksinst.com/service/servicehowtoorder.aspx
.
Note
Returned instruments will not be examined without a signed certificate indicating the
instruments are free of harmful materials.
Warning
All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or
toxic materials and is the responsibility of the user to ensure.
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Страница 56: ...Chapter Four Analog and Digital Interface Digital Interface Input and Output Options 46...
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Страница 68: ...Chapter Five Ethernet Interface Setup and Configuration Digital Interface Input and Output Options 58...
Страница 86: ...Chapter Six Embedded Web Based GUI and Diagnostics Tuning the MFC for Optional PC 76...
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Страница 105: ...Appendix A Product Specifications Electrical Specifications 95...
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Страница 112: ...Model Code Description Appendix C Health and Safety Form 102 Appendix C Health and Safety Form...