MKS P9B, Инструкция по эксплуатации, Страница: 81 / 112

Setup Mode Chapter Six: Embedded Web-Based GUI and Diagnostics
71
Figure 27: Embedded GUI, Optional PC Page in Setup Mode (15 pin D Analog Only)
Enabling the Optional Input
To enable the Optional Input, check the “Enable Optional Input” box and then click the “Set” button. You
should now see the fields below the checkbox become enabled (text darkens). The fields are described below.
Upstream/Downstream: The selection of either “Upstream” or “Downstream” is governed by the location of
the device that is the source of the optional input relative to the MFC. If the device is located in the gas flow
path upstream of the MFC, select “Upstream”. Similarly, if the device is located in the gas flow path
downstream of the device, select “Downstream”.
Full Scale: In this field you should enter the full scale range of the external signal. For example, if you have
a Baratron capacitance manometer with a full scale of 100 Torr, then you would put a value of 100 in this
field. To enter this value you must click the “Submit” button.
Optional Input: This field reports back what the optional input device is reading. Please note that this value is
dependent upon the value in the Full Scale field. To refresh this value, you must refresh the browser. If you
desire to watch a continuous data stream of the optional input, then you’ll need to go to the plot page. See the
Optional Input and the Plot Page
section on page 72 for more detail about this.
Optional Input Kp, Optional Input Ki, Optional Input Kd: These values are the PID parameters for Optional
Input control. Typically these will be set to match the standard Kp, Ki and Kd values that are factory set
before shipment. For information on how to tune your MFC for optimal performance please see
Tuning the
MFC for Optional Input
in the following section
.
This section discusses tuning the PID values. To set any of
these parameters you must click the “Submit” button. You can also set these parameters on the Plot Page.
To learn more, please see the
Optional Input and the Plot Page
section on page 72.