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3 Product and Functional Description | 3.5 Optional Components and Accessories
ZEISS
Info
Risk of malfunction: The diode segments are sensitive to the light that is used for illumination
in TV mode (infrared and white).
When you use a diode detector, always make sure that the TV illumination is switched off. If
the CCD Mode is set to
Auto Detect
, then the TV illumination is automatically switched off
when a diode detector is used.
Function
To improve resolution, the STEM unit enables positioning of the thin specimen close to the objec-
tive lens. The collected signals are equivalent to bright field imaging.
The STEM detector is used in cases where the thickness of a specimen is similar to or less than the
dimensions of the interaction volume. The specimen must be mounted on a TEM grid with a thin
carbon-film support (approximately 10 nm thick). Electrons that pass through the target can then
be collected by the detector and used to form an image.
3.5.1.6 CL Detector
Purpose
The Cathodoluminescence (CL) detector is an inclined detector that allows efficient visible or ultra-
violet light collection. The CL detector is ideal for use in geology, mineralogy, and materials sci-
ence applications where it can help in internal structural examination of rocks, ceramics, and
semiconductors.
Function
The prerequisite for using this detector is that the specimen emits light when interacting with the
primary electron beam. Differences in crystal structure or the presence of impurities in a cathodo-
luminescent material result in variations in the energy gap between the filled valence bands and
the empty conduction bands, and consequently a change in the CL emission.
The light (photons) emitted by the specimen is collected by the CL detector and converted into a
signal for imaging.
The CL detector is fully integrated into the automatic brightness and contrast control of the micro-
scope and can be used simultaneously with any of the detectors without degrading their perfor-
mance.
The detector can be used during energy-dispersive X-ray spectrometer (EDX) measurements and
wavelength-dispersive spectrometer (WDS) measurements at any valid magnification.
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Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
Summary of Contents for EVO
Page 1: ...Instruction Manual ZEISS EVO Scanning Electron Microscope...
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