ZEISS
Glossary
Glossary
aBSD
Annular Backscattered Electron Detector
Aperture
Mechanical limitation of an opening ori-
ented perpendicular to the optical axis,
which filters out electrons whose trajec-
tories (tracks) do not run close to the op-
tical axis.
Astigmatism
Lens aberration that distorts the shape of
the electron beam, compensated by the
stigmator.
AWD
Analytical Working Distance
Backscattered electrons
High-energy electrons that are liberated
from the specimen surface when the
specimen is hit by the primary electron
beam.
Bakeout
Degassing of surfaces of a vacuum sys-
tem by heating during the pumping
process.
BSD
Backscattered Electron Detector
BSE
Backscattered Electron
C2D
Cascade Current Detector
C2DX
Extended Cascade Current Detector
CAN
Controller Area Network
CCD
Charge-Coupled Device
CL
Cathodoluminescence
Condenser
Device that collects and focuses the elec-
tron beam onto the specimen.
D
Depth
DECT
Digital Enhanced Cordless Telecommuni-
cations
Depth of field
Distance along the optical axis which an
object in the specimen can be moved
while remaining in focus.
DPA
Differential Pumping Aperture
EBIC
Electron Beam Induced Current
EC
European Community
EDS
Energy Dispersive X-ray Spectroscopy
EDX
Energy Dispersive X-ray Spectroscopy
EHT
Extra High Tension
EIGA
European Industrial Gases Association
EM server
A server that implements the internal
communication between control soft-
ware and microscope hardware.
EMO
Emergency Off
EP
Extended Pressure
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
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Summary of Contents for EVO
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