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5 First Operating Steps | 5.7 Working with Specific Specimen Types
ZEISS
13. Select the USB connection and activate the
Humidity Option
checkbox.
14. In the
Vacuum
tab of the
SEM Controls
panel, select
Go to EP
.
15. Use the
EP Target
scroll bar to adjust the working pressure to 10 Pa.
16. Adjust the other working parameters. For information on working parameters for different
.
5.7.3.4 Purging the Chamber
You need to purge the chamber to remove air from the water bottle and to fill the chamber with
pure water vapor.
Procedure
1. From the
Panel Configuration Bar
, select
Extended Pressure
.
à
The
Extended Pressure
window is displayed.
2. Activate the
Peltier
checkbox.
3. Click
Purge Settings
.
à
The
Purge Control
window is displayed.
4. Check that
EP Gas = Air
is selected.
5. If the water kit has recently been fitted, filled with water, or has not been used for a while,
set
Purge cycles
to 10.
6. If the system has recently been used in the wet mode, set
Purge cycles
to 3.
7. Set
Purge Max
to 1000 Pa.
8. Set
Purge Min
to 100 Pa.
9. Click
EP Gas = Air
to toggle the vacuum status to
EP Gas = Water vapour
.
10. To start purging, click
Manual Purge H2O
.
à
The pressure in the chamber varies between the set maximum and minimum levels. Bub-
bles may be seen in the water bottle. All air is eventually removed from the water bottle.
à
The process can take a while to be completed. The progress is displayed in the status bar.
5.7.3.5 Setting Initial Operating Parameters
Procedure
1. In the
Extended Pressure
window, set the
Peltier Target
to 1 °C.
2. Adjust
Humidity Target
to a suitable value.
3. Adjust the position of the green cross on the phase diagram to change the environment of
the specimen between water vapor, water, or ice.
4. Switch on the beam.
5. Use the stage navigation to position the specimen under the beam.
INFO:
Use the
Stage Navigation Bar
or the chamberscope to monitor stage movement.
106
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
Summary of Contents for EVO
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