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7 Troubleshooting |
ZEISS
7 Troubleshooting
The following table provides information about solving common problems.
Info
If you cannot solve the problem or if you are unsure about a certain technical difficulty, con-
tact your local ZEISS service representative.
Symptom
Cause
Measure
Chamber does not
move freely
Isolation mounts
have lost air
Adjusting the Isolation Mounts
Drift: Specimen
seems to be moving
§
Charging effects
§
Nonconductive
specimen
§
Ensure proper conduction of the speci-
men
§
Optimize specimen preparation
§
Apply a charge compensation method
Stub not correctly
fixed by screw
Fix the stub correctly
After an emergency
off, the stored stage
position cannot be
approached correctly
Stage needs to be
initialized
Gun is switched off
automatically
Gun has been
switched off for
safety reasons since
gun vacuum is worse
than the pressure
threshold
Image is bad at low
EHT (e.g. 1 kV)
Working distance is
too long
Reduce the working distance to a maximum
of 7 mm
Image resolution is
low
Saturation values of
the filament are
wrong
Correct saturation values
Lifetime of the fila-
ment is exceeded
Microscope is dead
Circuit breaker is
tripped (lower posi-
tion)
Checking the Position of the Circuit
Stored position of
the specimen stage
cannot be ap-
proached correctly
Stage needs to be
driven to a well-de-
fined position
After a power fail-
ure, the stored stage
position cannot be
approached correctly
Stage needs to be
initialized
Scintillator is used up
Contact your local ZEISS service representa-
tive to have the scintillator replaced
114
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
Summary of Contents for EVO
Page 1: ...Instruction Manual ZEISS EVO Scanning Electron Microscope...
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