ZEISS
7 Troubleshooting | 7.2 Column
7.2.1.3 Starting the Bakeout
Info
You cannot work with the microscope while the bakeout procedure runs.
NOTICE
Hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, par-
ticularly after a long bakeout cycle.
4
Do not place any combustible objects on the grids of the electron optical column during
bakeout.
4
After the bakeout procedure, let surfaces cool down before working around the column.
4
Only advanced operators are allowed to perform the bakeout procedure.
Prerequisite
ü
Requires the
Supervisor
privilege and the user level
Service
.
ü
Only advanced operators are allowed to perform the bakeout procedure.
Procedure
1. In the
Panel Configuration Bar
, double-click
Bakeout
.
à
The
Bakeout
dialog is displayed.
2. If the
Full service bakeout
checkbox is available, deactivate the
Full service bakeout
checkbox.
INFO:
Full service bakeout includes column heating that may lead to column misalignment.
3. From the
Bakeout
drop-down list, select a bakeout cycle.
For 2 hours heating / 1 hours cooling, select
Quick
.
For 8 hours heating / 2 hours cooling, select
Overnight
.
For 40 hours heating / 3 hours cooling, select
Weekend
.
For a cycle defined by the operator, select
User
.
INFO:
You can switch to Standby mode while the bake-out procedure is running. Before
you switch to Standby mode, ensure that the
Partial Vent on Standby
checkbox is deacti-
vated in the
SEM Controls
panel.
4. To start the bakeout procedure, click
Bakeout Start
.
5. After bakeout, allow the column to cool down.
INFO:
The pressure changes due to residual heat in the gun area. A cooling period is neces-
sary to allow the vacuum to improve. The cooling period depends on the room tempera-
ture. The gun monitor monitors the pressure improvement as the cooling time progresses.
7.2.2 Replacing Filaments
The filament is the electron source of the microscope. To extract electrons from the filament, it is
heated up and a high voltage is applied. During operation, the filament slowly degrades. The fila-
ment must be replaced if it is used up or damaged.
Info
To display the operating hours of the filament, select
View > SEM Status > Select > Fila-
ment Age
.
Info
ZEISS encourages all customers to keep a record on the filament exchanges. Such a record
simplifies maintenance.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
121
Summary of Contents for EVO
Page 1: ...Instruction Manual ZEISS EVO Scanning Electron Microscope...
Page 179: ......