ZEISS
5 First Operating Steps | 5.7 Working with Specific Specimen Types
5. If another pressure-limiting aperture is fitted,
remove the aperture with the aperture removal
tool.
6. Use the VP aperture tool to either install the VP aperture or the EasyVP aperture.
INFO:
This should be finger-tight only.
7. Refit the lens-installed BSD detector.
8. In the
SEM Controls
panel, select the
Apertures
tab.
9. Click
Select Aperture
and select the appropri-
ate aperture.
10. To evacuate the specimen chamber, click
Pump
in the
Vacuum
tab.
11. Turn the knob of the mid-column aperture
changer, to select the appropriate aperture:
Select the 20 μm aperture (position 1) for
EasyVP mode.
Select the 750 μm aperture (position 3) for VP
mode.
12. In the
Apertures
tab, match the aperture size from the
Aperture Size
drop-down list to
the selected aperture.
13. In the
Vacuum
tab, click
Go To VP
.
14. To adjust the working pressure, use the
VP Target
scroll bar.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
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Summary of Contents for EVO
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