ZEISS
3 Product and Functional Description | 3.5 Optional Components and Accessories
3.5.1.3 BSD Detector (HDBSD, BSD1)
Purpose
The BSD is a semiconductor backscattered electron detector with exceptionally high sensitivity.
The detector consists of five diode segments, independently configurable. The BSD1 detector of-
fers faster speed and enhanced sensitivity, compared to the HDBSD detector. The BSD1 detector
is required for quantitative applications such as 3DSM.
Fig. 30: BSD detector with five segments in real life (left) and in SmartSEM (right)
In combination with low incident beam energies, the BSD detector can visualize very fine surface
details in high contrast.
Fig. 31: BSE images showing different contrast with different segment configuration of the BSD
detector; material contrast (left) and topography (right)
NOTICE
Motorized specimen stage
Risk of damaging the detector when operating the motorized specimen stage.
4
Retract the detector head completely after you have finished the work with the detector.
Info
Risk of malfunction: The diode segments are sensitive to the light that is used for illumination
in TV mode (infrared and white).
When you use a diode detector, always make sure that the TV illumination is switched off. If
the CCD Mode is set to
Auto Detect
, then the TV illumination is automatically switched off
when a diode detector is used.
The BSD detector has applications mainly in materials analysis and in the life sciences.
Material analysis:
§
Metallurgical sections
§
Geological sections
§
Complex materials
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
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