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ZEISS
Table of Contents
Table of Contents
1 General Information........................................................................ 6
Explanation of Warning Messages and Additional Information............................
Requirements for Operators .................................................................. 10
Safe Operating Condition...................................................................... 10
Mechanical Hazards .............................................................................. 11
Hazards generated by Materials and Substances ................................... 12
Hazards generated by Radiation............................................................ 13
Warning Labels and Lights .................................................................................. 13
2.4.1
Protective Cover Panels ......................................................................... 18
Main Disconnect Device ........................................................................ 19
3 Product and Functional Description ................................................ 21
Vacuum System .................................................................................................. 22
3.1.1
Variable Pressure Modes ....................................................................... 23
Electron Optical Column...................................................................................... 27
3.2.1
Optibeam Modes .................................................................................. 29
Detectors ............................................................................................................ 29
3.3.1
Principle of Signal Detection.................................................................. 30
Detectors Overview............................................................................... 32
Chamber CCD Camera .......................................................................... 37
SmartSEM User Interface....................................................................... 50
Graphical Control Elements ................................................................... 51
User Access Levels and User Privileges................................................... 52
SmartSEM Program Suite ...................................................................... 53
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
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Summary of Contents for EVO
Page 1: ...Instruction Manual ZEISS EVO Scanning Electron Microscope...
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